Characterizing thin films by RF and DC methods
Tobias Junginger
Outline• Cavity measurements
– Example: Nb on Cu (HiPIMS)
• Sample measurements with the Quadrupole Resonator– Example: Nb on Cu (ECR)
• Point contact tunneling– Example: Nb on Cu (HiPIMS)
• Muon Spin Rotation – Example 1: Nb on Cu (HiPIMS)
– Example 2: NbTiN/Nb
T. Junginger - Characterizing thin films by RF and DC methods 2/17
Cavity measurements
• The Q vs E measurement of an accelerating cavity is a critical milestone for any thin film development
• Sputter coated Nb films on Cu cavities have been used in the past for LEP-II and currently for LHC and HIE-Isolde
• In the 1990 the dcMS technology has been investigated in depth for 1.5 GHz cavities
• More recently energetic condensatio techniques such as HiPIMS are investigated as an alternative approach to overcome the current limitation of this technology, i.e. the field dependent residual surface resistance
T. Junginger - Characterizing thin films by RF and DC methods 3/17
HiPIMS: Motivation
T. Junginger - Characterizing thin films by RF and DC methods 4/17
By applying pulses of high power the sputtered target material atoms are ionized and applying biasing potential we can achieve:• Target material ions can be accelerated towards the substrate, higher kinetic energy upon
arrival• Ions are directed to the surface, thus non-flat surfaces can be sputtered with good
uniformity of the film
Rs(B) depends on the ion impact angle
352 MHz
HiPIMS: Status at CERN
T. Junginger - Characterizing thin films by RF and DC methods 5/17
1μm
Magnetron HiPIMS
• So far only tests without biasing• SEM images show more ordered surface
structure• RF performance equal to dcms with same
surface preparation • Biasing could be the key
• RRR of about 20-30
dcMS: 1.5 GHzHiPIMS: 1.3 GHz
Electron Cyclotron Resonance (ECR) at JLAB
• Another technique to create Nb films with high RRR and large grain size
• Deposition in vacuum with no sputter gas
• Deployement for deposition on cavities has just been initiated
• Tests on flat samples are necessary to probe the RF performance
T. Junginger - Characterizing thin films by RF and DC methods 6/17
Quadrupole Resonator (CERN/HZB)
T. Junginger - Characterizing thin films by RF and DC methods 7/17
dSHRPPPSample
SurfaceDCDCRF 2
2,1, 21
dSH
PPR
Sample
DCDC
Surface
2
2,1, )(2 Measured directly
• Measurement of transmitted power Pt
• Pt=c∫H2ds, c from computer code
Quadrupole Resonator (CERN)
T. Junginger - Characterizing thin films by RF and DC methods
400 MHz,4K
Features:• Sample tests over a parameter
range inaccessible to elliptical cavities
• Niobium and copper substrates can be used
• Three different RF frequencies, with almost identical magnetic field configuration
• Wide temperature range (2-20K)
• Precise calorimetric measurement (Accuracy about 0.05 nΩ)
Results on an ECR sampleRRR=53 Q-slope mitigated
S. Aull et al. SRF17 TUBA03
8/17
DC measurement techniques• There are several thin film coatings which might
be potentially interesting for SRF application but cannot yet be deposited on cavities
• Additional to RF sample tests there are several DC techniques, which can give invaluable information to optimize coating parameters and provide an understanding of loss mechanism
• Point contact tunneling can be used to measure the density of states directly
• Low energy muon spin rotation can be used to directly probe the field penetration
T. Junginger - Characterizing thin films by RF and DC methods 9/17
Point contact tunneling
T. Junginger - Characterizing thin films by RF and DC methods 10/17
dI
dV= -s N N(E)
¶ f (E + eV )
¶(eV )ò dE
Smeared BCS DOS
N(E) = Re| E | -iG
(| E | -iG)2 - D2
é
ëêê
ù
ûúú
Some zero bias peaks:Magnetic impurities?
Measurement on a HiPIMS sample
Muon Spin Rotation (μSR)
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• Muons are deposited one at a time in a sample
• Muon decays emitting a positron preferentially aligned with the muon spin
• Right and left detectors record positron correlated with time of arrival
• The time evolution of the asymmetry in the two signals gives a measure of the local field in the sample
Left detector
Right detector
Depth dependent (low energy) μSR
T. Junginger - Characterizing thin films by RF and DC methods 12/17
0 1 2 3 4 5 6 7 8 9 10
-1.0
-0.8
-0.6
-0.4
-0.2
0.0
0.2
0.4
0.6
0.8
1.0
Muon S
pin
Pola
risation
Time (s)
0 1 2 3 4 5 6 7 8 9 10
-1.0
-0.8
-0.6
-0.4
-0.2
0.0
0.2
0.4
0.6
0.8
1.0
Muon S
pin
Pola
risation
Time (s)
0 1 2 3 4 5 6 7 8 9 10
-1.0
-0.8
-0.6
-0.4
-0.2
0.0
0.2
0.4
0.6
0.8
1.0
Muon S
pin
Pola
risation
Time (s)
B(z)
z0
Superconductorin the Meissner State
Bext
l
Measuring fluctuating field
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Slow Fluctuations
Main effect is relaxation of
the ⅓ tail at long times,
because 1/3 of the muons
see a field in spin direction
and do not process
Fast Fluctuations
No recovery. For faster
fluctuations slower
depolarization (motional
narrowing)
Can be due to muon
diffusion or paramagnetism
May 10, 2013 CMMS China Tour 17
Thepolarisation functionsfromthefield distributionDynamical field at muon site (2)
Results for theGaussian field distribution:
PZ(t ). Envelope of PX(t ).
The number next to each
curve is the ratio cγµ ∆G
.
I Sensitivity to dynamicsover several decadesofc.I Whendynamicsisfast, i.e. c
γµ∆G> 1, PZ(t) and theenvelope
of PX(t) areexponential functions(motional narrowing limit)
PZ(t) = exp(−λZt) with λZ = 2γ2µ∆
2Gc(23)
env. of PX(t) = exp(−λXt) with λX = γ2µ∆
2Gc (24)
respectively; (c1/c).I Increased sensitivity to slowdynamics in zero field.
Thepolarisation functionsfromthefield distributionDynamical field at muon site (2)
Results for theGaussian field distribution:
PZ(t ). Envelope of PX(t ).
The number next to each
curve is the ratio cγµ ∆G
.
I Sensitivity to dynamicsover several decadesofc.I When dynamicsisfast, i.e. c
γµ∆G> 1, PZ(t) and theenvelope
of PX(t) areexponential functions(motional narrowing limit)
PZ(t) = exp(−λZt) with λZ = 2γ2µ∆
2Gc(23)
env. of PX(t) = exp(−λXt) with λX = γ2µ∆
2Gc (24)
respectively; (c1/c).I Increased sensitivity to slow dynamics in zero field.
Fast FluctuationsRelaxation is exponential
Slow FluctuationsMain effect is relaxation of
the ⅓ tail
at long times
Polarization function for different
fluctuation rates. The “0” function
corresponds to a Gaussian distribution of
random fields.
HiPIMS – PCT+muSR
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Hints for magnetic impurities from PCT Dynamic response
for HiPIMS sample
Growing a N2 overlayer on top of Nband stop muons close to Nb
Dynamic response rules out diffusionCrosscheck with Ni confirms that muon is static in N2
N2 on Nb
N2 on Ni
Co
mb
ined
res
ult
s st
ron
gly
sugg
est
par
amag
net
ic
imp
uri
ties
in
HiP
IMS
sam
ple
T. J
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MOTIVATION• T. Kubo suggests the use of a
bilayer system without insulator to reach high accelerating gradients
• He first calculates the penetration profile within London theory with appropriate boundary conditions
• He uses this result to calculate the forces acting on a vortex on the surface
• He concludes: A boundary of two SCs introduces a force that pushes a vortex to the direction of the material with larger penetration depth
T. Junginger - Characterizing thin films by RF and DC methods 15
Depth dependent muSR on NbTiN/Nb
Depth dependent muSR on NbTiN/Nb
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• We observe a single exponential dacaywith λ0=223(7)
• Proximity effect? Dirty Nb due to diffusion?
SIS: λ0=380(100) d=98(13) 8K
SS: λ0=204(18) d=135(11) 11K
Fit: cosh(x/λ0)/cosh(d/(2 λ0))
• Measure above Tc of Nb• Field enters from both sides
• Comparison with SIS sample (no proximity)
• Significantly different λ0 and d support proximity for SS
To benefit from the counter current flow an insulating layer is essential at least for the NbTiN/Nb system
Conclusion
• RF sample tests enable
– Testing materials which are not yet ready for deposition on cavities
– Having a faster turnaround than cavity tests, providing feedback for coating optimization
– Accessing a parameter space inaccessible to cavity tests
• DC methods
– Can measure superconducting and material parameters
– Provide information for coating parameter optimization
– Can give insight which material/structures are potentially useful for SRF application
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