ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Circuit building blocks for millimeter and sub-millimeter-wave systems
Ullrich Pfeiffer, Richard Al Hadi
High-Frequency and Communication Technology (IHCT) University of Wuppertal, Germany
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Outline
§ Motivation on Si-based mm-Wave and sub-mm-Wave systems
§ Below 240GHz circuit building block ─ 160-GHz low-noise down-converter ─ 220GHz Frequency Multiplier Chains
§ mm-Wave systems in SiGe technology ─ 240GHz Radar Transceiver
§ Sub-mm-Wave systems in SiGe technology ─ 320GHz Radar Chip-Set ─ 820GHz sub-harmonic chipset ─ THz power detector circuits in SiGe technology ─ 530GHz Free running oscillator array
§ Summary and conclusion
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy 3
§ Why Silicon? ─ Widely available technology ─ reliable and has repeatable performance ─ Enable system-on-chip ─ Compact systems for handheld applications ─ Low cost in high volumes
§ Problems: ─ High volume applications are missing… ─ Performance roll-off, e.g transistors gain and cutoff frequencies
Silicon technologies for mm-Wave and sub-mm-Wave applications
Ultimate goal
H. Sherry et. al, ISSCC 2012
λ
f
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Silicon (SiGe) HBT Technology Evolution
SiG
e H
BT
peak
cut
off f
requ
ency
[GH
z]
1995 2000 2005 2010
100
200 300 400
SiGe:C
2nd
3rd
4th
1st
SiGe HBT
R&D Today
60GHz Com. 77GHz Radar
mmWave THz Imaging
Radar
3.3V
2.4V
1.7V
1.5V
2015
“THz electronics”
160GHz Com. /Radar
5th
500 600 700 1.5V
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
160 and 220GHz circuit building blocks
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
A 160-GHz low-noise down converter
6 [Ref] E. Öjefors, F. Pourchon, P. Chevalier and U. Pfeiffer “A 160-GHz lownoise downconverter in a SiGe HBT technology.” EuMIC, October 2010
§ DOTFIVE EU project § STMicroelectronics BiCMOS9MW § 25 dB conversion gain § 7.4-dB noise figure without balun
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Active 220GHz Frequency Multiplier Chains
7 [Ref] Erik Öjefors, Bernd Heinemann and Ullrich R. Pfeiffer “Active 220- and 325-GHz Frequency Multiplier Chains in an SiGe HBT Technology.” RFIC, June 2011
§ DOTFIVE EU project § 0.13um SiGe BiCMOS IHP technology § 215-240GHz tuning range § -3dBm output power
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
A 240 GHz Circular Polarized monolithic FMCW Radar
Transceiver (EuMIC 2014)
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
240 GHz Radar SiGe-Transceiver 1/2
§ Single antenna with circ. polarization § +3 dBm EIRP § ~60 GHz usable band
[Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Operational Bandwidth of the TRX
• Peak total EIRP: +3 dBm @ 236 GHz
[Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Resulting Point Spread Function
§ Theoretical range resolution (6-dB FW, 60 GHz BW): § 1.21 x 2.5 mm = 3.03 mm § Measured range resolution: 3.65 mm
[Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
A 0.32 THz FMCW Radar Tx and Rx Chip-Set (ESSCIRC 2013)
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
0.32 THz SiGe-Tx-Rx for FMCW applications
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§ DOTFIVE STMicroelectronics SiGe technology § Max. radiated TX power: -5 dBm @ 0.311 THz § Operational Chip-Set BW: 27 GHz (0.311 – 0.338 THz) § TX: 2.1 x 0.45 mm², 500 mA @ 3.8 V § RX: 2.3 x 0.45 mm², 290 mA @ 3.2 V
[Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Lens Packaged SiGe-Chip-Set
• On-chip antennas
• Back-illumination through lossy 150µm-Si-substrate
• 4.5 mm HR-Si-lenses
• Improved antenna efficiency, gain and radiation pattern
[Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Resulting Point Spread Function
• Theor. range resolution (6-dB FW, 27 GHz BW): 1.21 x 5.56 mm = 6.72 mm
• Measured range resolution: 6.79 mm [Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
820GHz sub-harmonic chipset
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
A 820GHz SiGe TX chip § Input 18.3GHz external RF
signal § Four-channel spatial power
combining for increased output power
Transmitter
17 [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
TX Chip
A 820GHz SiGe TX
Simulated directivity of 12dBi
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-17dBm peak EIRP
§ Max. total output power of -29dBm (or -17dBm EIRP)
§ Control over frequency and phase § Power consumption of 3.7W and chip
area of 4.3x0.75mm2
[Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
820GHz SiGe Sub-Harmonic heterodyne RX
19 [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011
§ Differential 820-GHz RF from antenna mixes in Q1/Q2 with the 5th harmonic of the 162-GHz common-mode LO signal
§ Simulated conversion gain = -15 dB (0dBm LO)
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
RX antennas and HM arranged as a 2x2 FPA Sim. directivity of 6dBi/Channel
RX Chip
820Hz SiGe RX
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§ Conversion Gain of about -22dB, Noise Figure of about 47dB § Terahertz frequencies generated on chip around 820GHz § Power consumption of about 1.2W, chip area 2.3x0.57 (mm2) § Not scalable design for big arrays
[Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Terahertz power detectors in Silicon technologies
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
CMOS FPA Design Summary
[1] U. Pfeiffer und E. Öjefors, A 600-GHz CMOS Focal-Plane. IEEE European Solid-State Circuits Conference, P. 110-113, Sept. 2008
[2] E. Öjefors, N. Baktash, Y. Zhao, R. Al Hadi, H. Sherry und U. Pfeiffer, Terahertz imaging detectors in a 65-nm CMOS SOI technology, IEEE European Solid-State Circuits Conference, Seville, Spain (pp. 486 - 489), September 2010
[4] R. Al Hadi et al, “A Broadband 0.6 to 1 THz CMOS Imaging Detector with an Integrated Lens,” IMS 2011
[5] Pfeiffer, U.R.; Grzyb, J.; Sherry, H.; Cathelin, A.; Kaiser, A., "Toward low-NEP room-temperature THz MOSFET direct detectors in CMOS technology,” IRMMW-THz
[6] H. Sherry et al, “A 1kpixel CMOS camera chip for 25fps real-time terahertz imaging applications,” ISSCC Feb. 2012
2010: 65nm SOI
2011: 65nm Bulk
2008: 250nm
§ 650 GHz § 50 pW/√Hz
§ 1.027 THz § 66 pW/√Hz
2012: 65nm Bulk
§ 856 GHz § 100pW/√Hz
§ 650 GHz § 300 pW/√Hz
§ 700 GHz § 14pW/√Hz
2013: 65nm Bulk
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Small Arrays Camera
[1] [2] [3] [4] [5]
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
World’s first CMOS THz camera
Key features: § Active THz real-time imaging at
room temperature § 1024 (32x32) pixels § 65nm CMOS Bulk technology § 2.5µW/pixel power consumption § 0.75-1 THz (3-dB) bandwidth § 40dBi Silicon lens § Up to 500 fps video mode
─ 100-200kV/W (856GHz) ─ 10-20nW integr. NEP (856GHz)
§ Non video-mode: ─ 140kV/W Rv (856GHz, 5kHz chop.) ─ 100pW/√Hz NEP (856GHz, 5kHz
chop.)
Live demo at the Academic Demo Session (ADS) at the ISSCC 2012 Commercially available
23 [Ref] H. Sherry et al, “A 1kpixel CMOS camera chip for 25fps real-time terahertz imaging applications,” ISSCC Feb. 2012
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Terahertz Detector Array in a SiGe HBT
§ Part of DOTFIVE project § IHP 0.25um SiGe process § 3x5 FPA § NEP of about 50pW/sqrt(Hz)
24 [Ref] R. Al Hadi et al, “A Terahertz Detector Array in a SiGe HBT Technology,” JSSC. 2013
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Scalable silicon-based terahertz source array at
half terahertz
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Half terahertz 4x4 oscillator source array in SiGe
26 [Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Free-running harmonic oscillators § Combined Colpitts oscillators
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120deg 120deg
120deg
120deg 120deg
120deg
180deg
175GHz oscillator
3ed Harmonic extracted
[Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Source array chip micrograph
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2 mm
§ Chip area of about 2x2mm2
§ Scalable architecture in pixel count
§ Programmable interface at run time
§ Live demonstration at the ISSCC 2014
2.1
mm
[Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Source array measurements results
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§ Single pixel characterization § Array Characterization
§ DC power consump.on around 2.5W § Average of ~60µW/Pixel § Total output power ~1mW at 0.53THz § EIRP 25dBm
[Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014
ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Summary and conclusion § Below 240GHz circuit building blocks:
─ 160GHz down-converter ─ 220GHz multiplier chain
§ 240GHz transceivers : ─ Wide usable band for FMCW applications (3mm resolution)
§ 820GHz chipset: ─ Demonstration of the technology capability well beyond fT/fmax
§ Power detector FPAs in SiGe technology ─ NEP ~50pW/sqrt(Hz) at 700GHz
§ Source array at half terahertz ─ Up to 1mW output power at 530GHz ─ Scalable in size
mm-Wave and THz circuits in SiGe technologies are a serious alternative for existing systems
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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy
Acknowledgments § This project has received partial funding
from the European Union's Seventh Program for research, technological development and demonstration under grant agreement No 316755
§ European Commission under Project DOTFIVE 216110
§ STMicroelectronics, France § IHP Microelectronics, Germany § Infineon Technologies, Germany
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