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Circuit building blocks for millimeter and sub-millimeter …...Sep. 2014, Venice, Italy 240 GHz...

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ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy Circuit building blocks for millimeter and sub-millimeter-wave systems Ullrich Pfeiffer, Richard Al Hadi High-Frequency and Communication Technology (IHCT) University of Wuppertal, Germany [email protected]
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  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Circuit building blocks for millimeter and sub-millimeter-wave systems

    Ullrich Pfeiffer, Richard Al Hadi

    High-Frequency and Communication Technology (IHCT) University of Wuppertal, Germany

    [email protected]

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Outline

    §  Motivation on Si-based mm-Wave and sub-mm-Wave systems

    §  Below 240GHz circuit building block ─  160-GHz low-noise down-converter ─  220GHz Frequency Multiplier Chains

    §  mm-Wave systems in SiGe technology ─  240GHz Radar Transceiver

    §  Sub-mm-Wave systems in SiGe technology ─  320GHz Radar Chip-Set ─  820GHz sub-harmonic chipset ─  THz power detector circuits in SiGe technology ─  530GHz Free running oscillator array

    §  Summary and conclusion

    2

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy 3

    §  Why Silicon? ─  Widely available technology ─  reliable and has repeatable performance ─  Enable system-on-chip ─  Compact systems for handheld applications ─  Low cost in high volumes  

    §  Problems: ─  High volume applications are missing… ─  Performance roll-off, e.g transistors gain and cutoff frequencies

    Silicon technologies for mm-Wave and sub-mm-Wave applications

    Ultimate goal

    H. Sherry et. al, ISSCC 2012

    λ

    f

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Silicon (SiGe) HBT Technology Evolution

    SiG

    e H

    BT

    peak

    cut

    off f

    requ

    ency

    [GH

    z]

    1995 2000 2005 2010

    100

    200 300 400

    SiGe:C

    2nd

    3rd

    4th

    1st

    SiGe HBT

    R&D Today

    60GHz Com. 77GHz Radar

    mmWave THz Imaging

    Radar

    3.3V

    2.4V

    1.7V

    1.5V

    2015

    “THz electronics”

    160GHz Com. /Radar

    5th

    500 600 700 1.5V

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    160 and 220GHz circuit building blocks

    5

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    A 160-GHz low-noise down converter

    6 [Ref] E. Öjefors, F. Pourchon, P. Chevalier and U. Pfeiffer “A 160-GHz lownoise downconverter in a SiGe HBT technology.” EuMIC, October 2010

    §  DOTFIVE EU project §  STMicroelectronics BiCMOS9MW §  25 dB conversion gain §  7.4-dB noise figure without balun

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Active 220GHz Frequency Multiplier Chains

    7 [Ref] Erik Öjefors, Bernd Heinemann and Ullrich R. Pfeiffer “Active 220- and 325-GHz Frequency Multiplier Chains in an SiGe HBT Technology.” RFIC, June 2011

    §  DOTFIVE EU project §  0.13um SiGe BiCMOS IHP technology §  215-240GHz tuning range §  -3dBm output power

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    A 240 GHz Circular Polarized monolithic FMCW Radar

    Transceiver (EuMIC 2014)

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    240 GHz Radar SiGe-Transceiver 1/2

    §  Single antenna with circ. polarization §  +3 dBm EIRP §  ~60 GHz usable band

    [Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Operational Bandwidth of the TRX

    •  Peak total EIRP: +3 dBm @ 236 GHz

    [Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Resulting Point Spread Function

    §  Theoretical range resolution (6-dB FW, 60 GHz BW): §  1.21 x 2.5 mm = 3.03 mm §  Measured range resolution: 3.65 mm

    [Ref] K. Statnikov et al, “A 240 GHz Circular Polarized FMCW Radar Based on a SiGe Transceiver with a Lens-Integrated On- Chip Antenna.” EuMIC, Oct. 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    A 0.32 THz FMCW Radar Tx and Rx Chip-Set (ESSCIRC 2013)

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    0.32 THz SiGe-Tx-Rx for FMCW applications

    13

    § DOTFIVE STMicroelectronics SiGe technology § Max. radiated TX power: -5 dBm @ 0.311 THz § Operational Chip-Set BW: 27 GHz (0.311 – 0.338 THz) § TX: 2.1 x 0.45 mm², 500 mA @ 3.8 V § RX: 2.3 x 0.45 mm², 290 mA @ 3.2 V

    [Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Lens Packaged SiGe-Chip-Set

    •  On-chip antennas

    •  Back-illumination through lossy 150µm-Si-substrate

    •  4.5 mm HR-Si-lenses

    •  Improved antenna efficiency, gain and radiation pattern

    [Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Resulting Point Spread Function

    •  Theor. range resolution (6-dB FW, 27 GHz BW): 1.21 x 5.56 mm = 6.72 mm

    •  Measured range resolution: 6.79 mm [Ref] K. Statnikov et al, “A 0.32 THz FMCW Radar System Based on Low-Cost Lens-Integrated SiGe HBT Front-Ends.” ESSCIRC, Oct. 2013

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    820GHz sub-harmonic chipset

    16

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    A 820GHz SiGe TX chip §  Input 18.3GHz external RF

    signal §  Four-channel spatial power

    combining for increased output power

    Transmitter

    17 [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    TX Chip

    A 820GHz SiGe TX

    Simulated directivity of 12dBi

    18

    -17dBm peak EIRP

    §  Max. total output power of -29dBm (or -17dBm EIRP)

    §  Control over frequency and phase §  Power consumption of 3.7W and chip

    area of 4.3x0.75mm2

    [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    820GHz SiGe Sub-Harmonic heterodyne RX

    19 [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011

    §  Differential 820-GHz RF from antenna mixes in Q1/Q2 with the 5th harmonic of the 162-GHz common-mode LO signal

    §  Simulated conversion gain = -15 dB (0dBm LO)

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    RX antennas and HM arranged as a 2x2 FPA Sim. directivity of 6dBi/Channel

    RX Chip

    820Hz SiGe RX

    20

    §  Conversion Gain of about -22dB, Noise Figure of about 47dB §  Terahertz frequencies generated on chip around 820GHz §  Power consumption of about 1.2W, chip area 2.3x0.57 (mm2) §  Not scalable design for big arrays

    [Ref] E. Öjefors et al, “A 820GHz SiGe Chipset for Terahertz Active Imaging Applications,” ISSCC 2011

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Terahertz power detectors in Silicon technologies

    21

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    CMOS FPA Design Summary

    [1] U. Pfeiffer und E. Öjefors, A 600-GHz CMOS Focal-Plane. IEEE European Solid-State Circuits Conference, P. 110-113, Sept. 2008

    [2] E. Öjefors, N. Baktash, Y. Zhao, R. Al Hadi, H. Sherry und U. Pfeiffer, Terahertz imaging detectors in a 65-nm CMOS SOI technology, IEEE European Solid-State Circuits Conference, Seville, Spain (pp. 486 - 489), September 2010

    [4] R. Al Hadi et al, “A Broadband 0.6 to 1 THz CMOS Imaging Detector with an Integrated Lens,” IMS 2011

    [5] Pfeiffer, U.R.; Grzyb, J.; Sherry, H.; Cathelin, A.; Kaiser, A., "Toward low-NEP room-temperature THz MOSFET direct detectors in CMOS technology,” IRMMW-THz

    [6] H. Sherry et al, “A 1kpixel CMOS camera chip for 25fps real-time terahertz imaging applications,” ISSCC Feb. 2012

    2010: 65nm SOI

    2011: 65nm Bulk

    2008: 250nm

    §  650 GHz §  50 pW/√Hz

    §  1.027 THz §  66 pW/√Hz

    2012: 65nm Bulk

    §  856 GHz §  100pW/√Hz

    §  650 GHz §  300 pW/√Hz

    §  700 GHz §  14pW/√Hz

    2013: 65nm Bulk

    22

    Small Arrays Camera

    [1] [2] [3] [4] [5]

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    World’s first CMOS THz camera

    Key features: §  Active THz real-time imaging at

    room temperature §  1024 (32x32) pixels §  65nm CMOS Bulk technology §  2.5µW/pixel power consumption §  0.75-1 THz (3-dB) bandwidth §  40dBi Silicon lens §  Up to 500 fps video mode

    ─  100-200kV/W (856GHz) ─  10-20nW integr. NEP (856GHz)

    §  Non video-mode: ─  140kV/W Rv (856GHz, 5kHz chop.) ─  100pW/√Hz NEP (856GHz, 5kHz

    chop.)

    Live demo at the Academic Demo Session (ADS) at the ISSCC 2012 Commercially available

    23 [Ref] H. Sherry et al, “A 1kpixel CMOS camera chip for 25fps real-time terahertz imaging applications,” ISSCC Feb. 2012

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Terahertz Detector Array in a SiGe HBT

    §  Part of DOTFIVE project §  IHP 0.25um SiGe process §  3x5 FPA §  NEP of about 50pW/sqrt(Hz)

    24 [Ref] R. Al Hadi et al, “A Terahertz Detector Array in a SiGe HBT Technology,” JSSC. 2013

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Scalable silicon-based terahertz source array at

    half terahertz

    25

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Half terahertz 4x4 oscillator source array in SiGe

    26 [Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Free-running harmonic oscillators §  Combined Colpitts oscillators

    27

    120deg 120deg

    120deg

    120deg 120deg

    120deg

    180deg

    175GHz oscillator

    3ed Harmonic extracted

    [Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Source array chip micrograph

    28

    2 mm

    §  Chip area of about 2x2mm2

    §  Scalable architecture in pixel count

    §  Programmable interface at run time

    §  Live demonstration at the ISSCC 2014

    2.1

    mm

    [Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Source array measurements results

    29

    § Single pixel characterization § Array Characterization

    §  DC  power  consump.on  around  2.5W  §  Average  of  ~60µW/Pixel  §  Total  output  power  ~1mW  at  0.53THz  §  EIRP  25dBm  

    [Ref] U. Pfeiffer et al, “A 0.53THz reconfigurable source array with up to 1mW radiated power for terahertz imaging applications in 0.13µm SiGe BiCMOS,” ISSCC 2014

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Summary and conclusion §  Below 240GHz circuit building blocks:

    ─  160GHz down-converter ─  220GHz multiplier chain

    §  240GHz transceivers : ─  Wide usable band for FMCW applications (3mm resolution)

    §  820GHz chipset: ─  Demonstration of the technology capability well beyond fT/fmax

    §  Power detector FPAs in SiGe technology ─  NEP ~50pW/sqrt(Hz) at 700GHz

    §  Source array at half terahertz ─  Up to 1mW output power at 530GHz ─  Scalable in size

    mm-Wave and THz circuits in SiGe technologies are a serious alternative for existing systems

    30

  • ESSCIRC, THz-Workshop Sep. 2014, Venice, Italy

    Acknowledgments §  This project has received partial funding

    from the European Union's Seventh Program for research, technological development and demonstration under grant agreement No 316755

    §  European Commission under Project DOTFIVE 216110

    §  STMicroelectronics, France §  IHP Microelectronics, Germany §  Infineon Technologies, Germany

    31


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