Your ceramic-tooling partner for the front-end
semiconductor industry
Schunk SemiconductorAn international group of companies
SCHUNK INGENIEURKERAMIK GmbHHanns-Martin-Schleyer-Straße 5, 47877 Willich, Germany
Tel.: +49 2154 4970, fax: +49 2154 497 111
[email protected]
SCHUNK KOHLENSTOFFTECHNIK GmbHRodheimer Straße 59, 35452 Heuchelheim, Germany
Tel.: +49 641 6080, fax: +49 641 608 1673
[email protected]
XYCARB CERAMICS B.V. Zuiddijk 4, 5705 CS Helmond, The Netherlands
Tel.: +31 492 548 345, fax: +31 492 578 787
[email protected]
XYCARB CERAMICS INC.101 Inner Loop Road, Georgetown, TX 78626, USA
Tel.: +1 800 989 9227, fax: +1 512 863 7376
[email protected]
visit us at >> www.schunk-semiconductor.com
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Your partner for complete packages
A division of the world-renowned Schunk group, Schunk
Semiconductor is a leading manufacturer of high-quality ceramic
products for the semiconductor wafer manufacturing and wafer
processing industry. Our specialities encompass the whole range of
ceramic products essential to the industry - including CVD-coated,
carbon-fiber-composite (CFC), graphite, quartz and ceramic products.
This combined capability gives us full command of all technologies needed to meet the demanding requirements of the
modern semiconductor manufacturing industry. Creating a world-class strategic partner ideally positioned to help you
capitalize on your own technical strengths. A partner who can fully support you with the innovative products you need to
meet the challenges of the new millennium and one, moreover, who can work and grow with you as this latest, exciting
chapter of the electronics age unfolds.
All Schunk Semiconductor products are manufactured with the prime objectives of increasing manufacturing yields, process
speeds and product quality.
Our products meet the semiconductor industry’s toughest demands for dimensions, purity and particle level. At every major
production step, measures are taken to prevent product contamination and to ensure that the required specifications are met.
Critical production steps, final inspection and packaging are done in ultra clean-room conditions and systems are in place that
enable full traceability from raw material to final product. All our activities are steered by the principles of ISO9001 (ISO/TS
16949 in process), providing an operational framework for achieving our quality goals and 100% customer satisfaction.
We also fully embrace the principles of Environmental Management according ISO14001 - ensuring that our products have
minimum impact on the environment and helping to preserve natural resources for future generations.
Specified by major manufacturers of wafer-processing equipment
worldwide, our products are also the first choice of wafer and
chip manufacturers themselves, for the high level of quality and
innovation they embody.
Combined capability
Schunk Semiconductor brings together
the expertise of several specialist companies,
each a major player in its own area.
The Schunk Group
The Schunk Group is a global technologies conglomerate
with an exceptionally wide spectrum of products in materials
as well as in systems engineering. The group comprises
many individual companies that operate independently in the
world’s markets. This guarantees a high degree of flexibility
as well as proximity to customers.
The Schunk Group currently employs over 7500 people
worldwide. The group’s headquarters are located in the
Frankfurt area, Germany. The group has subsidiaries
in 25 countries.
In addition, there are joint ventures and strategic alliances
with other companies, partners and research institutes.
More information on the Schunk Group can be found on
the internet at: www.schunk-group.com
Meeting the highest quality and environmental standards
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The operating company Xycarb Ceramics, plays a leading role in the development
and manufacture of silicon carbide coated susceptors (barrel and single-wafer) for
epitaxial processes. The coatings help to extend susceptor lifetime, improve process
uptimes and cut cost of ownership. Xycarb Ceramics’ capabilities encompass
a broad range of CVD coatings. These include aluminium nitride,
used as a fluorine-etch resistant coating for single-wafer
CVD applications, and tantalum carbide for very
high-temperature applications. The operating
company Schunk Kohlenstofftechnik also has
extensive capabilities in the application of silicon
carbide, pyrolytic carbon and boron carbide coatings.
A crucial quality-determining factor of a product,
the coating, enhances the properties of the substrate material
and makes the products better tailored for applications in
the semiconductor industry.
Schunk Semiconductor also carries the full line of Philips
Semiconductor lamps for all your fab’s process requirements.
These include lamps for single wafer EPI, batch EPI,
ashing and RTP applications.
Schunk Semiconductor is also playing a leading role in
the development of next generation susceptor kits for
wafer-processing equipment. A key tool in developing better
products, our pre-production computer simulations provide
in-depth information on coating properties, enabling us to
manufacture very thin, stress- and temperature-optimized parts
to extremely close tolerances.
For the highest product purity, all our coated
products are manufactured in clean rooms with purity
monitoring and analysis methods that include
SEM, EDAX, XRD and GDMS.
epi/mocvdsetting the standard in susceptors
The operating company
Xycarb Ceramics also fabricates
coated and uncoated graphite
products for MOCVD applications.
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All our parts are supplied to the highest purity levels. The total
ash is lower than 10 ppm for parts up to 1300 mm in diameter.
For low particle release, all the graphite and carbon-carbon (C/C)
parts up to 1300 mm diameter can be coated with pyrolytic
carbon and SiC.
The C/C composite material can also be infiltrated with CVI-SiC
and CVI-PYC to protect the matrix and the fibers themselves from
methanisation in the H2 atmosphere used in the polysilicon produc-
tion stage. For the insulation package, we can supply high corrosion
resistant soft and rigid graphite felt or foam. This material can be
purified and infiltrated with PYC or SiC in the same way as the
C/C composites and graphite.
No doubt that the semiconductor market is quickly changing through continuous development (summarized in Moore’s law). Your problems
are challenges for our R&D team. With our experience and long history we can help you move forward with your developments. Product
developments have proven to be the most successful when organized in projects with our customers. The latest process developments resulted
in two new materials: T-SiC and C-SiC.
T-SiC
Parts are formed by a thick CVD SiC coating process on a machined carbon form (product negative). Removing the carbon leaves a pure
thick SiC final product, with exceptional clean bulk purity. Product configurations vary from small pins up to big plates. Product details and sur-
face finish can be machined to customer demands. A Schunk patented XClean process leaves an ultra high surface purity.
C-SiC
Parts are preformed in carbon fiber reinforced carbon of high purity. Through impregnation with molten silicon the material is converted
into SiC. Not all of the carbon reacts with the silicon, resulting in a composite structure. This C-SiC material is mechanically strong, has a high
thermal shock resistance and a high purity.
real innovationby process &
product development optimized for today’s
leading-edge processes
high-purity graphite and carbon composite
for crystal growing
2800o C PYC coated crucible for growing optical or detector crystals.
1500o C CFC and graphite componentsfor crystal growing units in the semiconductor industry.
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a wide range of critical workshop products
The operating company Xycarb Ceramics fabricates
precision-machined parts for major manufacturers and users
of ion implantation equipment.
Our graphite parts can be supplied uncoated, impregnated
or coated with pyrolytic carbon or silicon carbide CVD
to enhance their properties.
Schunk Semiconductor also supplies refractory metals and ceramic
products for, even the latest generation, ion implantation
equipment. This makes Schunk Semiconductor your ultimate
partner for ion implantation consumables. To fulfill process
improvement demands we also manufacture special products
tailored to customer requirements.
ion implant
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Our operating company Xycarb Ceramics is a long-standing
supplier to the semiconductor industry, well versed in working
with all semiconductor quartz grades. Our experience in this
area, our precision computer-controlled machining plus our
advanced thermal forming and treatments enable us to achieve
the high product quality essential for your current and future
production systems.
To manufacture quartzware
to the highest technical
specifications, our production
centers make widespread use
of robotic manufacturing
equipment, much of it designed
in-house. Our fully-automated quartz welders, for instance, give
reproducible, stress-free welds that are seamless and blemish-free.
Flame-polishing too is fully automated to create highly uniform,
high-purity, virtually stress-free products. We can supply quartzware
to any required customer specification including visual quality.
We make extensive use of simulations to design out stresses in
our quartz products long before they enter production.
What’s more, optimal surface treatments completely eliminate
all risk of particle contamination during production.
quartz products
meeting all your current and future requirements
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Schunk Semiconductor has all the necessary know-how,
experience and equipment in-house to produce precision
ceramic products with tolerances within the micron range.
Modern products are geared, in particular, toward large size
capabilities for 300 mm technology and far beyond.
Each product is designed and manufactured with the
optimum mix of properties for the intended application
(e.g. purity, electrical conductivity, thermal capacitance
and corrosion resistance).
Well-controlled production processes, high-precision CNC
machining and product monitoring guarantee the highest quality
levels. And multi-stage cleaning ensures that all products meet
customers’ specified cleanness and visual appearance.
In addition, developments at our R&D centers are currently
setting the scene for a whole new range of innovative ceramic
materials meeting the present and future needs of the semicon-
ductor industry. We are currently involved in almost every major
innovation geared to your needs
Strict control exercised over both macroscopic features and
microstructure enables us to regulate and even alter many
of the material properties in order to meet rapidly changing
requirements for the latest generations of systems and
applications. It also means we can develop ceramic materials
with unique chemical, mechanical and electrical properties
precisely tailored to our customers’ requirements.
ceramic and silicon products
Main materials
available today:
Alumina (Al2O3)
Sapphire (Al2O3)
Aluminum nitride (AlN)
Boron carbide (B4C)
Quartz (SiO2)
Silicon nitride (Si3N4)
Silicon carbide (SiC-hotpressed)
Silicon carbide (SiC-CVD)
Silicon-infiltratedSiC (SiSiC)
Polycristalline silicon (Si)
Single cristalline silicon (Si)
All kinds of special composites
development in semiconductor ceramics, bringing to the field a
unique combination of material production know-how and
advanced machining capabilities.
New advanced ceramic sintering processes achieve purity levels
that are among the highest in the industry, and our advanced
coating processes are leading to unique combinations between
ceramics and CVD coatings.
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Serving your global needs
Wherever your production facilities are located, Schunk
Semiconductor will be close by. And our worldwide sales
and technical support network provides effective assistance
to customers throughout the semiconductor industry.
Visit our website at: www.schunk-semiconductor.com
to get the most up-to-date overview of our sales offices.
Schunk Semiconductor’s expertise and continuous investment in its business is the key to providing you with
a competitive edge in your own markets. With Schunk Semiconductor as your business partner, you’re guaranteed
unrivalled expertise and resources such as:
• High-precision ceramic tooling and machining meeting the most demanding specifications including those
for processing wafers of 300 mm and larger.
• Choice of several ceramic materials for every wafer process. Currently, we make use of over forty types of ceramic,
with new materials added regularly.
• Research facilities developing new materials with application-tailored chemical and physical properties.
• World-class CVD coatings and deposition technology.
• CNC equipment at all facilities.
• Proprietary, fully-automated equipment for seamless, blemish-free welding of quartzware.
Besides having excellent appearance, welds produced by
this equipment are highly reproducible and stress-free.
• Modern factories using advanced and efficient production
methods able to operate to any required quality standard.
• Traceabilty from raw material to final product.
• Clean-room cleaning and packaging that guarantees up
to Class 10 packed products.
• Well-controlled processes with quality monitoring
(using 3D CMM inspection equipment) at every major
stage of manufacture.
• Global sales and distribution network providing effective logistics.
• Dedicated and skilled workforce. On-going training programs ensure staff remain up-to-date and
qualified in their function.
• Continuous innovation and investment in new technologies and materials.
• Computer simulation (finite element analysis) for stress and temperature optimized designs.
• Supply of complementary products such as infrared lamps and refractory metal parts.
our services providing the competitive edge<< <<>>
• Custom engineering
• Co-production programs
• Task-force teams for efficient
operations and short time-to-market
• In-house design, development and
production
• Repair and refurbishment service
• Comprehensive suite of CAD tools
and precision computer-controlled
machining to any required standard
• World-wide customer support
• World-class logistics with various
on-time supply arrangements
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