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The top documents tagged [mechanical material]
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mechanical material
physical distribution
344 views
Chang Liu MASS UIUC A brief history of MEMS fabrication Chang Liu Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign.
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MEMS and Microstructures in Aerospace Applications. Chapter 3. Mems Fabrication
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Micro Electro Mechanical Systems (MEMS) Class Materials - Lecture 01
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SPM Linesheet 2015
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Refraction Intro
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Mems and Nems.ppt
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A Typical Material Selection Report
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UCI Fall 2012 - Dr. Marc Madou. Chapter 1 Si as an Electronic. Photonic and Mechanical material Chapter 2 Lithography Chapter 3 Advanced Lithography.
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Silicon Programming--Introduction to MEMS 1 Introduction to MEMS; energy domains; mechanical and fluidic devices.
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Silicon Programming--Introduction to MEMS 1 Interfacing--MEMS; energy domains; mechanical and fluidic devices.
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6/21/2015 Advanced Manufacturing Choices MAE 165-265 Spring 2013, Dr. Marc Madou Class 2.
217 views
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