Advanced Manufacturing Program and Nanomanufacturing Research at NSF
Khershed P. Cooper, PhDProgram Director
Advanced ManufacturingENG/CMMI
National Science Foundation
nanoMFG node Workshop, UIUC, February 26, 2019
Outline
• NCN & nanoMFG node
• Nanomanufacturing Research– Programmatic Achievements– New concepts– Challenges
• Advanced Manufacturing
• Funding Opportunity
• Summary
22/26/2019 K. P. COOPER - nanoMFG node workshop
NCN nanoMFG node
• Hierarchical nanoMFG - Computation and simulation software to address the challenges of hierarchical nanomanufacturing processes from nanoscale components to devices and systems, and their scale up
• The nanomanufacturing field could benefit from a comprehensive approach involving advanced cyberinfrastructure tools to design integrated manufacturing facilities incorporating knowledge from the full spectrum of length scales, from the molecular to the enterprise-wide, using state-of-the-art theoretical (analytical) formulations and computational (numerical) techniques
• This includes introducing novel abstract concepts and representations, mathematical algorithms and analysis methods, and bridging from the atomistic to continuum domains, inspired by or mimicking the multifaceted synthetic manufacturing aspects of the natural and engineered manufacturing enterprise
• Challenges of incorporating data and information from the nano to the meso scales need to be addressed
• Plans should incorporate continuous feedback loops among all the length scales and stages of the simulation using atomistic scale information to design and synthesize the nanoscale building-blocks, their assembly into higher order nanostructures and integration of these into components and devices and systems while simultaneously developing either batch or continuous global manufacturing schemes, products and services
• Of particular interest is development of nanomanufacturing concepts for complex, hierarchical systems involving diverse material sets, including inorganic, organic and biomaterials
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Nanomanufacturing Research
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Nanomanufacturing is fabrication of nano-scale building-blocks (nanomaterials, nanostructures), their assembly into higher-order structures, and the integration of these into larger scale systems
https://enme.umd.edu/cnmm/
• Nanoscale: Approx. 1-100 nm• a dimension – significant benefit
• Processes:• Bottom-up (self- and directed-assembly); • Top-down (lithography, deposition,
removal)
• Integration: • Hierarchical / heterogeneous; • Across: length scales, materials (0D, 1D,
2D), geometries, processes, functions
Nanomanufacturing Research is the study of processes to manipulate and control matter at the nanoscale in 1-, 2-, and 3-dimensions, reproducibly
NSF Investments in Nanomanufacturing• Nanomanufacturing (NM): Establish fundamental principles for novel nano-scale
processes for large-scale manufacturing of nanomaterials and nanostructures• Scalable Nanomanufacturing (SNM): Study new approaches to overcome key scientific
and technical barriers that prevent the manufacture of useful nanomaterials, nanostructures, nanodevices and nanosystems at an industrially relevant scale, reliably, at low cost and within environmental, health and safety guidelines
• Scalable Nanomanufacturing for Integrated Systems (SNM-IS): Study and formulate fundamental principles for scalable or customizable manufacturing and integration for nanotechnology-based integrated systems towards the eventual manufacture of useful nanotechnology products
• Nano Science & Engineering Centers (NSECs): Interdisciplinary research to understand nanoscale processes, develop tools for measurement and manufacturing at the nanoscale, develop concepts for high-rate synthesis and processing of nanostructures and nanosystems, and scale-up of nanoscale processing methods
• Nanosystems Engineering Research Centers (NERCs): Center-level activity to integrate engineering research and education with technological innovation
• Nanomanufacturing in NSF Big Ideas: Rules of Life; Quantum Leap; Harnessing the Data Revolution
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Bridge gap between nanoscience discoveries and nanotech products
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Examples of Scientific and Technical Barriers
• 3D printing methods are limited in printing resolution and throughput
• Moore’s Law is in danger of ending because difficulty and expense of approachesthat rely on using ever shorter wavelengths of light are becoming prohibitive
• Understanding nucleation and growth of nano-arrays under continuous flowconditions
• Difficult to fabricate and assemble 0D, 1D, 2D nanostructures over large areas and in 3D configurations
• Conventional 2D printing utilizes inks that require post-print processing and cannot fabricate sub-micron structures, which limits the substrate and ink selection
• Soft-lithographic contact printing relies on patterned elastomeric stamps and demands better adhesive control at the stamp-substrate interface
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Research Areas - Applications
• Environmental: Water/Air Purification, Analytical Separation
• Chemical: Catalysis, Gas Storage
• Energy: Storage, Conversion, Harvesting, Batteries, Supercapacitors, PVs, Solar Cells, Fuel Cells
• Electronics: ICs, Flexible, Storage Memory, 3D Devices, TFTs, EM-Shielding
• Optoelectronics/Photonics: Imaging, Waveguides, Displays, Lighting, Metamaterials
• Sensors: Biological, Chemical, Multiplexed, Quantum
• Structural: High-Strength, Light-Weighting, Packaging
• Biomedical: Implants, Tissue Scaffolds, Diagnostics, Therapeutics, Drugs, Probes
• Sheets/Wires: Fibers, Cables, Filters, Membranes, Textiles, Paper, Fabric, Nonwovens
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Research Areas - Materials
• C-based: CNT, Graphene, Bucky-tape, CNT Fibers, Cellulosic
• 0D: Nanoparticles, QDs, Core-shell, Janus, Hierarchical, Composite
• 1D: Nanowires, Nanopillars, Nanotubes, Nanofibers
• 2D: MoS2, BN, TMDs
• 3D: Nanoporous, Aerogels, MOFs
• Material Systems: Metals, Ceramics, Polymers, Organics, Biomaterials, Composites
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Research Areas - Processes
• Chemical/Thermal: Combustion, Plasma, Hydrothermal, Drawing, Etching
• Vapor-based: CVD, PVD, PECVD, Laser CVD, ALD, MLD
• Fluid/Solution-based: Coating, Casting, Colloids, Electrospray, Electrophoresis, Electrospinning, Electroetching, Microfluidics, Microreactors, Ink-jet Printing
• Lithography/Patterning: AFM/STM, DPN, NIL, PLD, FIB, EUV, EBL, BCP
• Assembly: Self, Directed (chemical, magnetic, acoustic), Molecular
• Bio-enabled/Bio-inspired: DNA, Virus, Protein, Peptides, Diatoms
• Mechanical: Exfoliation, Nanomachining, Ball-milling
• 3D Nanomanufacturing: 3D Nanoprinting, Holographic Lithography, MacEtch
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ISO TC 229 Nanomanufacturing Terminology Standard; Published Dec. 2013; Project led by the NNN; 31 participant countries; Access terms for free via the ISO Concept Database
156 terms and definitions focusing on various types of nanomanufacturing processes
Scale-up Methods
• Continuous Roll-to-Roll Process, Top-down/Bottom-up Methods • Processes: Printing, Imprinting, Self-assembly, Deposition, Coating, Lamination• Examples: Printing of nanoparticles, forming of CNT Bucky paper, and convective deposition of self-
assembled nanoparticles
• Parallel, Large-area Top-down or Bottom-up Processes• Processes: Lithography, Direct-write, Directed-assembly, Self-assembly• Example: Optical lithography using parallel nanoantennae arrays
• Parallel, Large-area 3D Nanofabrication• Processes: 2-Photon Polymerization, Nanoimprinting and Self-assembly, Strain Engineering• Example: Projection stereolithography and direct write of 3D heterogeneous biological scaffolds
• Continuous or Parallel Reaction Synthesis/Fluidics Techniques• Processes: Microreactor, Microfluidic, Hydrothermal synthesis, Chemical synthesis, Plasma,
Electrospray, Electrospinning, Fiber-drawing• Example: Grow quantum dots and core-shell nanoparticles in colloids or solutions
• Large-area Bio-enabled Nanofabrication• Process: Templating using DNA• Example: Molecular self-assembly of atomically-precise, defect-free DNA patterns
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Examples of Scale-up Approaches
Roll-to-roll Nanopatterning(SV Sreenivasan, UT-Austin)
Vibration-assisted Convective Deposition(James Gilchrist, Lehigh)
y
z
x
Parallel Bow-tie Antenna Array Patterning (Xianfan Xu, Purdue)
Secondary lamp
Flash lamp
Overlap between two lamp lights
R2R/Flash-Sinter Metal Patterning(Chih-hung Chang, Oregon State)
2-12
nm
Microfluidic Reactor for QDs(Klavs Jensen, MIT)
Micellular Electrspray of Nanocomposite (Jessica Winter, Ohio State)3D Printing of Biomimetic Scaffold
(Shaochen Chen, UC-San Diego)
Field-directed Aligned Nanoporous Films(Chinedum Osuji, Yale)
Gas Bearing
Gas Bearing
Gas BearingPrecursor A Precursor B
Exhaust
Substrate Motion
Multi-layer Roll-to-Roll ALD/MLD (Yung-Cheng Lee, U of Colorado-Boulder)
DNA Masks with Embedded Metrology(William Hughes, Boise State)
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Integrated Systems – Scalability
12
Scalable Biomineralization of Functional Oxide Nanoparticles and Nanostructures for Environmental and Energy Applications (Bryan Berger, Lehigh)
Manufacturing Autonomy for Directed Evolution of Materials (MADE-Materials) for Robust, Scalable Nanomanufacturing
(David Hoelzle, Ohio State)
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Integrated Systems – Customization
13
Energy Storage
Personalized Nano-bio sensor
OLED outputDiode Rectifier
Substrate
ZnO-based semiconductor
Ag NP
ALD Al2O3
Ag NP100 nmSubstrate
ZnO-based semiconductor
ITO NPITO NP
ALDAl2O3
Ag NP
Back gate sensor
Nano-bio
Sensor
Substrate
High-k dielectric
Ag NP
ALD Al2O3
Ag NP
Ground trace (Transparent)
Loop Antenna (Transparent)
-1 0 10.0
0.2
0.4
0.6
0.8
1.0
(Y0.6Sc0.4)2O3
C/C
ox
Volts
0.1 Hz
f = 10kHz
Additive Nanomanufacturing of Integrated Systems for PersonalizedHealth Monitoring (Neil Dasgupta, UMich)
Customized Inkjet Printing of Graphene-Based Real-time Water
Sensors(Deyang Qu, UW-Milwaukee)
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Nano Science & Engineering Centers (NSECs)
14
Scalable and Integrated Nano Manufacturing (SINAM) (Xiang Zhang, UC-Berkeley)
Nano Chemical-Electrical-Mechanical Manufacturing Systems (Nano-CEMMS)
(Placid Ferreira, UIUC)
Center for High-Rate Nanomanufacturing (CHN) (Ahmed Busnaina, Northeastern)
Center for Hierarchical Manufacturing (CHM) (Jim Watkins, UMass-Amherst)
Create nanomanufacturing tools and platforms
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Plasmonic Nanolithography Nanofluidics, E-jet, S4
Offset-printing R2R, DSA, NIL, etc.
Nanosystems ERC - NASCENT
Nanomanufacturing Systems for Mobile Computing and Energy Technologies SV Sreenivasan and Roger Bonnecaze, UT-Austin, UNM, UC-Berkeley
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Plasma/Wet Etch
Nanoshape Imprint
Metal/Dielectric Deposition
Nanomaterials Deposition
NanoScale Encapsulation
Graphene Transfer
High Speed Process & Functional Metrology
NASCENTTechnology
Existing Technology
Exemplar Mobile Devices to Validate R2R Manufacturing Capability: THz Graphene Transceivers, Display Polarizers, PlasmonicOLED Cameras , Etc.
NASCENT nm-FAB Facility—R2R and Flex WS
Nanosystems ERC - CELL-MET
16
Heart TissueCardiac Muscle CellsCells
2 cm
Nano- and Additive Manufacturing:
AC, OVJP, 2-photon polymerization; patterning, printing glues, 3D scaffolds
Cell / Tissue Engineering:
Cell assembly & differentiation
Centimeter-scale, Vascularized Cardiac Tissue
Directed Multiscale Assembly of Cellular Metamaterials with Nanoscale Precision David Bishop, BU, UMich, FIU
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Develop hybrid manufacturing strategies
Nanomanufacturing in NSF Big Ideas
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Rules of Life• Designing and Engineering of Synthetic Cells and Cell
Components• Convergence of chemical synthesis; self-assembly; process
control; reaction engineering; mass transport; biomaterials science, biochemistry; molecular structure, dynamics and modeling
• Advanced nanomanufacturing technologies, such as DNA-enabled nanofabrication, to produce subsystems such as motors, actuators, reactors, etc.
Quantum Leap• Quantum Idea Incubator - Transformational Advances in
Quantum Systems • “The manufacture of quantum materials and their
integration into quantum devices and systems will require new approaches in materials engineering and processing, as well as designing and building across length scales, material sets, and functionalities.”
New Nanomanufacturing Concepts
• Guided Molecular Assembly across length scales
• Micro/Nano Fabs – desktop factories
• Bio-Nanomanufacturing – harnessing biology or nature, using living cells directly, borrowed, or taken as inspiration
• Hierarchical Nanomanufacturing – 3D heterogeneous integration
• Modular Nanosystems
• Manufacturing of Nanomachines, Manufacturing by Nanomachines, e.g., molecular machines
• Atomically Precise Manufacturing – 2D quantum metamaterials
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Compact 3D ICs from 2D Materials (Kaustav Banerjee, UCSB)
Atomically Precise Doping(Wiley Kirk, UT-Arlington &
John Randall, Zyvex)
Nanomachines
Nanomanufacturing Challenges
Desired Outcomes• Process—controllability, reproducibility, repeatability, reliability• Production—scalability, customizability, affordability, yield, efficiency, cycle time,
safety• Product—manufacturability• Design principles for production systems—advanced manufacturing tools, systems
and platforms
Appropriate Metrics• Precision/accuracy of placement• Feature size and resolution• Overlay registration• Nanostructure density, complexity, rate of forming• Compromise: feature size and resolution v. processing rate v. volume throughput
Strategies• Material selection, unit operations/processes (e.g., screen printing), fab
integration, packaging
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Industry Perspective
• Potential benefits must outweigh risks
• Statistically significant data
• Predictable performance
• Proven history
• Stable supply base
• Potential to develop a pervasive manufacturing paradigm
• Access to models and simulations
• Access to prototyping facilities
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Advanced Manufacturing (AM) Program
GOALS:
• Fundamental research to revitalize American manufacturing, grow national prosperity and workforce, and reshape the Nation’s strategic industries
• Multidisciplinary research to accelerate advances in manufacturing technologies that fundamentally alter and transform manufacturing capabilities, methods and practices
• Research that crosses domain boundaries in the ‘old’ CM, MME, MEP and NM areas
• Convergent research that brings manufacturing to new application areas by incorporating challenges and approaches outside the customary manufacturing portfolio
BUDGET: Proposals of all sizes as justified by the project description
Investigators are encouraged to discuss their ideas with the PDs in advance of submission at [email protected]
Program Officers: Steven Schmid, Brigid Mullany, Khershed Cooper, Bruce Kramer
DUE DATE: Full Proposals accepted anytime
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Basic research to build a knowledge base for advanced manufacturing
PD 19-088Y: https://www.nsf.gov/funding/pgm_summ.jsp?pims_id=505572
Data• About 600 active AM
awards• About 160 NM
awards
Advanced Manufacturing DCL
Transforming the CMMI Advanced Manufacturing Core Programs to Revitalize the Nation's Strategic Industries
Potential Research Areas
• Manufacturing at all length scales, from nano-to-macro, enabling new paradigms in material processing and structure formation
• New processes and processing regimes utilizing novel processing conditions, often at the extremes of current conditions or using externally imposed fields
• Integration of machine learning, optimization, AI, data science with manufacturing
• Materials processing offering unprecedented control and range of the microstructures and properties
• Surface and interface engineering allowing new engineering structures or levels of performance
• Innovations in manufacturing machines and processes
• Cybermanufacturing research enabling leaps in the evolution of network-accessed manufacturing services
• Processes extending the use of materials in forms beyond their accessed range such as in extreme environments
• Manufacturing of bio-incorporated and compatible structures
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NSF 18-091: https://www.nsf.gov/pubs/2018/nsf18091/nsf18091.jsp
Partner with OE program
Manufacturing USA DCL
• Encourage proposals that address critical fundamental research needs in advanced manufacturing in one or more of the Manufacturing USA Institutes' focus areas
• Resulting knowledge can, in turn, enable new technologies that feed into the innovation pipelines of one or more of the Manufacturing USA Institutes
• Proposals that include a collaboration with a Manufacturing USA Institute and leverage the facilities, infrastructure and member companies of that Institute are particularly encouraged
Advanced Manufacturing Research to Address Basic Research Enabling Innovation at Manufacturing USA Institutes
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• Proposals can be Regular, Collaborative, GOALI, Supplement (to existing grant)• The proposal title should contain “Manufacturing USA”
17-030: https://www.nsf.gov/pubs/2017/nsf17030/nsf17030.jsp
NSF Big Idea: Harnessing the Data Revolution
Institutes for Data-Intensive Research in Science and Engineering• Bringing Data Scientists, Computer Scientists, and Mathematicians/Statisticians
together with domain Scientists and Engineers
• Researchers addressing fundamental data-driven scientific questions in Manufacturing are encouraged to apply
• Two avenues• Ideas Labs (individuals participate and form a team through the Ideas Lab activity)
• Frameworks proposals (full proposals submitted by a team of Domain Scientists/Engineers and Data/Computer Scientists)
• Solicitations are currently accepting proposals
– NSF 19-543 HDR Ideas Labs Pre-proposal deadline March 4, 2019
– NSF 19-549 HDR Frameworks Full proposal deadline May 7, 2019
• Contact Program Directors listed in the solicitation or Alexis Lewis [email protected]
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Summary
25
Processes
Materials
Tools
Metrology
Standards
Education
Economics
Workforce
EHS
Information
Nano and Advanced
Manufacturing
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1ST NANOMFG NODE WORKSHOP ON DATA-SCIENCE ENABLED ADVANCES IN NANOMANUFACTURING (DSEAN)
• NCN & nanoMFG node
• Nanomanufacturing Research– Programmatic Achievements– New concepts– Challenges
• Advanced Manufacturing
• Funding Opportunity
