+ All Categories
Home > Documents > EE141- Spring 2004 Digital Integrated...

EE141- Spring 2004 Digital Integrated...

Date post: 25-Sep-2020
Category:
Upload: others
View: 15 times
Download: 0 times
Share this document with a friend
25
EE141 1 EE141 1 EE141-S04 EE141 EE141- Spring 2004 Spring 2004 Digital Integrated Digital Integrated Circuits Circuits Lecture 28 Lecture 28 Semiconductor Memory Semiconductor Memory EE141 2 EE141-S04 Administrative Stuff Administrative Stuff Homework 10 posted – just for practice. No need to turn in. Poster presentations tomorrow. No lecture. Sign up for time slot (office door of Prof. Rabaey). Poster template on web-site. Last lecture on Th – overview of future trends in digital IC design. Project 2 + Final discussion. Also HKN review. Your feedback is important!
Transcript
Page 1: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

1

EE1411

EE141-S04

EE141EE141-- Spring 2004Spring 2004Digital Integrated Digital Integrated CircuitsCircuits

Lecture 28Lecture 28Semiconductor MemorySemiconductor Memory

EE1412

EE141-S04

Administrative StuffAdministrative Stuff

Homework 10 posted – just for practice. No need to turn in.Poster presentations tomorrow. No lecture. Sign up for time slot (office door of Prof. Rabaey). Poster template on web-site.Last lecture on Th – overview of future trends in digital IC design. Project 2 + Final discussion. Also HKN review. Your feedback is important!

Page 2: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

2

EE1413

EE141-S04

MemoryMemory

EE1414

EE141-S04

Issues in MemoryIssues in Memory

Memory ClassificationMemory ArchitecturesThe Memory CorePeripheryReliabilityCase Studies

Page 3: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

3

EE1415

EE141-S04

Semiconductor Memory ClassificationSemiconductor Memory Classification

Read-Write MemoryNon-VolatileRead-Write

Memory

Read-Only Memory

EPROM

E2PROM

FLASH

RandomAccess

Non-RandomAccess

SRAM

DRAM

Mask-Programmed

Programmable (PROM)

FIFO

Shift Register

CAM

LIFO

EE1416

EE141-S04

Memory Timing: DefinitionsMemory Timing: Definitions

Page 4: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

4

EE1417

EE141-S04

Memory Architecture: DecodersMemory Architecture: Decoders

Word 0

Word 1

Word 2

Word N2 2

Word N2 1

Storagecell

M bits M bits

N

w or ds

S0

S1

S2

SN2 2

A 0

A 1

A K2 1

K 5 log2N

SN2 1

Word 0

Word 1

Word 2

Word N2 2

Word N2 1

Storagecell

S0

Input-Output(M bits)

Intuitive architecture for N x M memoryToo many select signals:

N words == N select signals K = log2NDecoder reduces the number of select signals

Input-Output(M bits)

D e co de r

EE1418

EE141-S04

ArrayArray--Structured Memory ArchitectureStructured Memory Architecture

Page 5: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

5

EE1419

EE141-S04

Hierarchical Memory ArchitectureHierarchical Memory Architecture

Advantages:Advantages:1. Shorter wires within blocks1. Shorter wires within blocks2. Block address activates only 1 block => power savings2. Block address activates only 1 block => power savings

EE14110

EE141-S04

Block Diagram of 4 Block Diagram of 4 MbitMbit SRAMSRAM

Subglobalrow decoder

Global row decoder

Subglobalrow decoder

Block 30

Block 31

128 K Array Block 0

Block 1

Clockgenerator

CS, WEbuffer

I/Obuffer

Y-addressbuffer

X-addressbuffer

x1/x4controller

Z-addressbuffer

X-addressbuffer

Predecoder and block selectorBit line load

Transfer gateColumn decoder

Sense amplifier and write driverLocal row decoder

[Hirose90]

Page 6: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

6

EE14111

EE141-S04

ReadRead--Only Memory CellsOnly Memory Cells

WL

BL

WL

BL

1WL

BL

WL

BL

WL

BL

0

VDD

WL

BL

GND

Diode ROM MOS ROM 1 MOS ROM 2

EE14112

EE141-S04

MOS OR ROMMOS OR ROM

WL[0]

VDD

BL[0]

WL[1]

WL[2]

WL[3]

Vbias

BL[1]

Pull-down loads

BL[2] BL[3]

VDD

Page 7: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

7

EE14113

EE141-S04

MOS NOR ROMMOS NOR ROM

WL[0]

GND

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Pull-up devices

BL [2] BL [3]

GND

EE14114

EE141-S04

MOS NOR ROM LayoutMOS NOR ROM Layout

Programmming using theActive Layer Only

Polysilicon

Metal1

Diffusion

Metal1 on Diffusion

Cell (9.5λ x 7λ)

Page 8: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

8

EE14115

EE141-S04

MOS NOR ROM LayoutMOS NOR ROM Layout

Polysilicon

Metal1

Diffusion

Metal1 on Diffusion

Cell (11λ x 7λ)

Programmming usingthe Contact Layer Only

EE14116

EE141-S04

MOS NAND ROMMOS NAND ROM

All word lines high by default with exception of selected row

WL [0]

WL [1]

WL [2]

WL [3]

VDD

Pull-up devices

BL [3]BL [2]BL [1]BL [0]

Page 9: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

9

EE14117

EE141-S04

MOS NAND ROM LayoutMOS NAND ROM Layout

No contact to VDD or GND necessary;

Loss in performance compared to NOR ROM

drastically reduced cell size

Polysilicon

Diffusion

Metal1 on Diffusion

Cell (8λ x 7λ)

Programmming usingthe Metal-1 Layer Only

EE14118

EE141-S04

NAND ROM LayoutNAND ROM LayoutCell (5λ x 6λ)

Polysilicon

Threshold-alteringimplant

Metal1 on Diffusion

Programmming usingImplants Only

Page 10: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

10

EE14119

EE141-S04

Equivalent Transient Model for MOS NOR ROMEquivalent Transient Model for MOS NOR ROM

Word line parasiticsWire capacitance and gate capacitanceWire resistance (polysilicon)

Bit line parasiticsResistance not dominant (metal)Drain and Gate-Drain capacitance

Model for NOR ROM VDD

Cbit

rword

cword

WL

BL

EE14120

EE141-S04

Equivalent Transient Model for MOS NAND ROMEquivalent Transient Model for MOS NAND ROM

Word line parasiticsSimilar to NOR ROM

Bit line parasiticsResistance of cascaded transistors dominatesDrain/Source and complete gate capacitance

Model for NAND ROMVDD

CL

rword

cword

cbit

rbit

WL

BL

Page 11: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

11

EE14121

EE141-S04

PrechargedPrecharged MOS NOR ROMMOS NOR ROM

PMOS precharge device can be made as large as necessary,but clock driver becomes harder to design.

WL [0]

GND

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Precharge devices

BL [2] BL [3]

GND

pref

EE14122

EE141-S04

NonNon--Volatile MemoriesVolatile MemoriesThe FloatingThe Floating--gate transistor (FAMOS)gate transistor (FAMOS)

Floating gate

Source

Substrate

Gate

Drain

n+ n+_p

tox

tox

Device cross-section Schematic symbol

G

S

D

Page 12: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

12

EE14123

EE141-S04

FloatingFloating--Gate Transistor ProgrammingGate Transistor Programming

0 V

2 5 V 0 V

DS

Removing programming voltage leaves charge trapped

5 V

2 2.5 V 5 V

DS

Programming results inhigher VT.

20 V

10 V 5 V 20 V

DS

Avalanche injection

EE14124

EE141-S04

A “ProgrammableA “Programmable--Threshold” TransistorThreshold” Transistor

Adobe Systems

Page 13: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

13

EE14125

EE141-S04

FLOTOX EEPROMFLOTOX EEPROM

Floating gate

Source

Substratep

Gate

Drain

n1 n1

FLOTOX transistorFowler-NordheimI-V characteristic

20–30 nm

10 nm

-10 V

10 V

I

VGD

EE14126

EE141-S04

EEPROM CellEEPROM Cell

WL

BL

VDD

Absolute threshold controlis hardUnprogrammed transistor might be depletion

2 transistor cell

Page 14: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

14

EE14127

EE141-S04

Flash EEPROMFlash EEPROM

Control gate

erasure

p-substrate

Floating gate

Thin tunneling oxide

n1 source n1 drainprogramming

Many other options …

EE14128

EE141-S04

CrossCross--sections of NVM cellssections of NVM cells

EPROMFlashCourtesy Intel

Page 15: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

15

EE14129

EE141-S04

Basic Operations in a NOR Flash MemoryBasic Operations in a NOR Flash Memory――EraseErase

EE14130

EE141-S04

Basic Operations in a NOR Flash MemoryBasic Operations in a NOR Flash Memory――WriteWrite

Page 16: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

16

EE14131

EE141-S04

Basic Operations in a NOR Flash MemoryBasic Operations in a NOR Flash Memory――ReadRead

EE14132

EE141-S04

NAND Flash MemoryNAND Flash Memory

Unit Cell

Word line(poly)

Source line(Diff. Layer)

Courtesy Toshiba

Adobe Systems

Page 17: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

17

EE14133

EE141-S04

NAND Flash MemoryNAND Flash Memory

Word linesSelect transistor

Bit line contact Source line contact

Active area

STI

Courtesy Toshiba

EE14134

EE141-S04

ReadRead--Write Memories (RAM)Write Memories (RAM)STATIC (SRAM)

DYNAMIC (DRAM)

Data stored as long as supply is appliedLarge (6 transistors/cell)FastDifferential

Periodic refresh requiredSmall (1-3 transistors/cell)SlowerSingle Ended

Page 18: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

18

EE14135

EE141-S04

66--transistor CMOS SRAM Cell transistor CMOS SRAM Cell

WL

BL

VDD

M5M6

M4

M1

M2

M3

BL

QQ

EE14136

EE141-S04

CMOS SRAM Analysis (Read)CMOS SRAM Analysis (Read)WL

BL

VDD

M 5

M 6

M 4

M1VDDVDD VDD

BL

Q = 1Q = 0

Cbit Cbit

Page 19: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

19

EE14137

EE141-S04

CMOS SRAM Analysis (Read)CMOS SRAM Analysis (Read)

0

0

0.2

0.4

0.6

0.8

1

1.2

0.5

V o lt ag e ri se [ V]

1 1.2 1.5 2Cell Ratio (CR)

2.5 3

Vol

tage

Ris

e (V

)

EE14138

EE141-S04

CMOS SRAM Analysis (Write) CMOS SRAM Analysis (Write)

BL = 1 BL = 0

Q = 0Q = 1

M1

M4

M5

M6

VDD

VDD

WL

Page 20: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

20

EE14139

EE141-S04

CMOS SRAM Analysis (Write)CMOS SRAM Analysis (Write)

EE14140

EE141-S04

6T6T--SRAM SRAM —— Layout Layout

VDD

GND

QQ

WL

BLBL

M1 M3

M4M2

M5 M6

Page 21: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

21

EE14141

EE141-S04

ResistanceResistance--load SRAM Cellload SRAM Cell

Static power dissipation -- Want RL largeBit lines precharged to VDD to address tp problem

M3

RL RL

VDD

WL

Q Q

M1 M2

M4

BL BL

EE14142

EE141-S04

33--Transistor DRAM CellTransistor DRAM Cell

No constraints on device ratiosReads are non-destructiveValue stored at node X when writing a “1” = VWWL-VTn

WWL

BL1

M1 X

M3

M2

CS

BL2

RWL

VDD

VDD 2 VT

DVVDD 2 VTBL 2

BL 1

X

RWL

WWL

Page 22: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

22

EE14143

EE141-S04

3T3T--DRAM DRAM —— LayoutLayout

BL2 BL1 GND

RWL

WWL

M3

M2

M1

EE14144

EE141-S04

11--Transistor DRAM CellTransistor DRAM Cell

Write: CS is charged or discharged by asserting WL and BL.Read: Charge redistribution takes places between bit line and storage capacitance

Voltage swing is small; typically around 250 mV.

∆V BL VPRE– VBIT VPRE–CS

CS CBL+------------= =V

Page 23: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

23

EE14145

EE141-S04

DRAM Cell ObservationsDRAM Cell Observations1T DRAM requires a sense amplifier for each bit line, due

to charge redistribution read-out.DRAM memory cells are single ended in contrast to

SRAM cells.The read-out of the 1T DRAM cell is destructive; read

and refresh operations are necessary for correct operation.

Unlike 3T cell, 1T cell requires presence of an extra capacitance that must be explicitly included in the design.

When writing a “1” into a DRAM cell, a threshold voltage is lost. This charge loss can be circumvented by bootstrapping the word lines to a higher value than VDD

EE14146

EE141-S04

Sense Amp OperationSense Amp Operation

DV(1)

V(1)

V(0)

t

VPRE

VBL

Sense amp activatedWord line activated

Page 24: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

24

EE14147

EE141-S04

11--T DRAM CellT DRAM Cell

Uses Polysilicon-Diffusion Capacitance

Expensive in Area

M1 wordline

Diffusedbit line

Polysilicongate

Polysiliconplate

Capacitor

Cross-section Layout

Metal word line

Poly

SiO2

Field Oxiden+ n+

Inversion layerinduced byplate bias

Poly

EE14148

EE141-S04

SEM of polySEM of poly--diffusion capacitor 1Tdiffusion capacitor 1T--DRAMDRAM

Page 25: EE141- Spring 2004 Digital Integrated Circuitsbwrcs.eecs.berkeley.edu/Classes/icdesign/ee141_s04/... · 2004. 5. 3. · EE141 1 EE141 1 EE141-S04 EE141- Spring 2004 Digital Integrated

EE141

25

EE14149

EE141-S04

Advanced 1T DRAM CellsAdvanced 1T DRAM Cells

Cell Plate Si

Capacitor Insulator

Storage Node Poly

2nd Field Oxide

Refilling Poly

Si Substrate

Trench Cell Stacked-capacitor Cell

Capacitor dielectric layerCell plateWord line

Insulating Layer

IsolationTransfer gate

Storage electrode


Recommended