+ All Categories
Home > Documents > EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

Date post: 01-Jan-2017
Category:
Upload: dinhlien
View: 262 times
Download: 5 times
Share this document with a friend
42
SM 1 1 SM EECE 488 – Set 1: Introduction and Background EECE488: Analog CMOS Integrated Circuit Design Introduction and Background Shahriar Mirabbasi Department of Electrical and Computer Engineering University of British Columbia [email protected] Technical contributions of Pedram Lajevardi in revising the slides is greatly acknowledged. 2 SM EECE 488 – Set 1: Introduction and Background Marking Assignments 10% (4 to 6) Midterm 15% Project 25% Final Exam 50%
Transcript
Page 1: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 1

1SMEECE 488 – Set 1: Introduction and Background

EECE488: Analog CMOS Integrated Circuit Design

Introduction and Background

Shahriar Mirabbasi

Department of Electrical and Computer EngineeringUniversity of British Columbia

[email protected]

Technical contributions of Pedram Lajevardi in revising the slides is greatly acknowledged.

2SMEECE 488 – Set 1: Introduction and Background

Marking

Assignments 10% (4 to 6)

Midterm 15%

Project 25%

Final Exam 50%

Page 2: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 2

3SMEECE 488 – Set 1: Introduction and Background

References

• Main reference: Lecture notes• Recommended Textbook:� Behzad Razavi, Design of Analog CMOS Integrated Circuits, McGraw-

Hill, 2001• Some other useful references:� T. Chan Carusone, D. Johns and K. Martin, Analog Integrated Circuit

Design, 2nd Edition, John Wiley, 2011� P. Gray, P. Hurst, S. Lewis, and R. Meyer, Analysis and Design of

Analog Integrated Circuits, 5th Edition, John Wiley, 2009� D. Holberg and P. Allen, CMOS Analog Circuit Design, 3rd Edition,

Oxford University Press, 2011� R. Jacob Baker, CMOS Circuit Design, Layout, and Simulation, 3rd

Edition, Wiley-IEEE Press, 2010� A. Sedra and K.C. Smith, Microelectronic Circuits, 5th or 6th Edition,

Oxford University Press, 2004, 2009� Journal and conference articles including IEEE Journal of Solid-State

Circuits and International Solid-State Circuits Conference

4SMEECE 488 – Set 1: Introduction and Background

Fun to Check

William F. Brinkman, Douglas E. Haggan, and William W. Troutman,“A History of the Invention of the Transistor and Where It Will LeadUs,” IEEE Journal of Solid-State Circuits, volume 32, no. 12,December 1997, pp. 1858-1865

http://download.intel.com/newsroom/kits/22nm/pdfs/Intel_Transistor_Backgrounder.pdf

Boris Murmann, “Digitally Assisted Analog Circuits,” IEEE Micro, vol.26, no. 2, pp. 38-47, Mar. 2006.

Interesting CAD Tools by Dr. Michael Perrott and his group:

http://www.cppsim.com/download_hspice_tools.html

Page 3: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 3

5SMEECE 488 – Set 1: Introduction and Background

Why Analog?

• Most of the physical signals are analog in nature!

• Although digital is great we need an analog interface to convertphysical signals from analog to digital

• Also, in some application after processing the signals in digital domain,we need to convert them back to analog.

• Thus in many applications analog and mixed-signal circuits are theperformance bottlenecks.

• Also with constant process improvements the boundary of betweenhigh-speed digital and analog circuits becomes more and more fuzzy!

• That is why analog and mixed-signal designers are still and hopefullywill be in demand for the foreseeable future.

6SMEECE 488 – Set 1: Introduction and Background

Typical Real World System

• Example:

DSP

Dat

a C

onve

rter

AFE

Filter ADC DSPG

Page 4: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 4

7SM

Intel’s Tick-Tock Model

EECE 488 – Set 1: Introduction and Background

Tick (process technology advancement), Tock (new microarchitecture)

http://www.intel.com/content/www/us/en/silicon-innovations/intel-tick-tock-model-general.html

8SM

Intel 45 nm Process

EECE 488 – Set 1: Introduction and Background

http://blog.oregonlive.com/siliconforest/2007/11/intel11.pdf

Page 5: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 5

9SMEECE 488 – Set 1: Introduction and Background

Background

1. Suggested Reading

2. Structure of MOS Transistors

3. Threshold Voltage

4. Long-Channel Current Equations

5. Regions of Operation

6. Transconductance

7. Second-Order Effects

8. Short-Channel Effects

9. MOS Layout

10.Device Capacitances

11.Small-signal Models

12.Circuit Impedance

13.Equivalent Transconductance

10SMEECE 488 – Set 1: Introduction and Background

Suggested Reading

• Most of the material in this set are based on

Chapters 2, 16, and 17 of the Razavi’s book: Design of AnalogCMOS Integrated Circuits

Many of the figures in this set are from © Design of Analog CMOS Integrated Circuits,McGraw-Hill, 2001, unless otherwise noted.

Page 6: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 6

11SMEECE 488 – Set 1: Introduction and Background

Transistor

• Transistor stands for …

• Transistor are semiconductor devices that can be classified as

– Bipolar Junction Transistors (BJTs)

– Field Effect Transistors (FETs)

• Depletion-Mode FETs or (e.g., JFETs)

• Enhancement-Mode FETs (e.g., MOSFETs)

12SMEECE 488 – Set 1: Introduction and Background

Simplistic Model

• MOS transistors have three terminals: Gate, Source, and Drain

• The voltage of the Gate terminal determines the type of connectionbetween Source and Drain (Short or Open).

• Thus, MOS devices behave like a switch

Device is OND is shorted to S

Device is OFFD & S are disconnected

VG low

Device is OFFD & S are disconnected

Device is OND is shorted to S

VG high

PMOSNMOS

Page 7: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 7

13SMEECE 488 – Set 1: Introduction and Background

Physical Structure - 1

• Source and Drain terminals are identical except that Source providescharge carriers, and Drain receives them.

• MOS devices have in fact 4 terminals:– Source, Drain, Gate, Substrate (bulk)

© Microelectronic Circuits, 2004 Oxford University Press

14SMEECE 488 – Set 1: Introduction and Background

Physical Structure - 2

LD: Due to Side Diffusion

Poly-silicon used instead of Metalfor fabrication reasons

• Actual length of the channel (Leff) is less than the length of gate

• Charge Carriers are electrons in NMOS devices, and holes inPMOS devices.

• Electrons have a higher mobility than holes

• So, NMOS devices are faster than PMOS devices

• We rather to have a p-type substrate?!

Page 8: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 8

15SMEECE 488 – Set 1: Introduction and Background

Physical Structure - 3

• N-wells allow both NMOS and PMOS devices to reside on thesame piece of die.

• As mentioned, NMOS and PMOS devices have 4 terminals:

Source, Drain, Gate, Substrate (bulk)

• In order to have all PN junctions reverse-biased, substrate ofNMOS is connected to the most negative voltage, and substrateof PMOS is connected to the most positive voltage.

16SMEECE 488 – Set 1: Introduction and Background

Physical Structure - 4

• MOS transistor Symbols:

• In NMOS Devices:

Current flows from Drain to Source

• In PMOS Devices:

Current flows from Source to Drain

• Current flow determines which terminal is Source and which oneis Drain. Equivalently, source and drain can be determined basedon their relative voltages.

DrainSource electron →

DrainSource hole→

Page 9: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 9

17SMEECE 488 – Set 1: Introduction and Background

Threshold Voltage - 1

(a) An NMOS driven by a gate voltage, (b) formation of depletion region, (c) onset of inversion,and (d) channel formation

• Consider an NMOS: as the gate voltage is increased, the surfaceunder the gate is depleted. If the gate voltage increases more,free electrons appear under the gate and a conductive channel isformed.

• As mentioned before, in NMOS devices charge carriers in thechannel under the gate are electrons.

18SMEECE 488 – Set 1: Introduction and Background

Threshold Voltage - 2

• Intuitively, the threshold voltage is the gate voltage that forces theinterface (surface under the gate) to be completely depleted of charge (inNMOS the interface is as much n-type as the substrate is p-type)

• Increasing gate voltage above this threshold (denoted by VTH or Vt)induces an inversion layer (conductive channel) under the gate.

© Microelectronic Circuits, 2004 Oxford University Press

Page 10: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 10

19SMEECE 488 – Set 1: Introduction and Background

Threshold Voltage - 3

Analytically:

ox

dep

FMSTH C

QV +Φ⋅+Φ= 2

Where:

substrate silicon the and gate npolysilico the

of functions workthe between difference the

Potential in-Built

=

Φ−Φ==Φ SilicongateMS

⋅⋅==Φ

i

sub

F n

N

q

TK lnpotential)atic (electrost Function Work

subFsidepNq Q ⋅Φ⋅⋅⋅== ε4region depletion the in Charge

20SMEECE 488 – Set 1: Introduction and Background

Threshold Voltage - 4

• In practice, the “native” threshold value may not be suited forcircuit design, e.g., VTH may be zero and the device may be on forany positive gate voltage.

• Typically threshold voltage is adjusted by ion implantation into thechannel surface (doping P-type material will increase VTH ofNMOS devices).

• When VDS is zero, there is no horizontal electric field present in thechannel, and therefore no current between the source to the drain.

• When VDS is more than zero, there is some horizontal electric fieldwhich causes a flow of electrons from source to drain.

Page 11: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 11

21SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 1

• The voltage of the surface under the gate, V(x), depends on thevoltages of Source and Drain.

• If VDS is zero, VD= VS=V(x). The charge density Qd (unit C/m) is uniform.

)( THGSoxd VVWCQ −−=

))(()( THGSoxd VxVVWCxQ −−−=

( ) ( )L

VVWLC

L

VC

L

QQ THGSox

d

−⋅−=⋅−=−=

• If VDS is not zero, the channel is tapered, and V(x) is not constant. Thecharge density depends on x.

22SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 3

velocityQdt

dx

dx

dQ

dt

dQI d ⋅=×==

dt

dVEEvelocity −=⋅= ,µ

))(

(dx

xdVvelocity

−⋅=→ µ

))(()( THGSoxd VxVVWCxQ −−−=

∫ −−=∫==

DSV

VTHGSnox

L

xD dVVxVVWCdxI

00

])([µ

]2

1)[( 2

DSDSTHGSoxnD VVVVL

WCI −−= µ

• Current :

� Velocity in terms of V(x):

� Qd in terms of V(x):

dx

xdVVxVVWCI nTHGSoxD

)(])([ µ−−=

• Current in terms of V(x):

• Long-channel current equation:

© Microelectronic Circuits, 2004 Oxford University Press

Page 12: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 12

23SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 4

( )

⋅−⋅−⋅⋅⋅= 2

2

1DSDSTHGSoxnD VVVV

L

WCI µ

• Terminology:

effTHGS VVVVoltageEffectiveVoltageOverdriveL

WRatioAspect

=−==

=

• Current in Triode Region:

• If VDS ≤ VGS-VTH we say the device is operating in triode (or linear) region.

24SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 5

( )

( )

( )THGSoxnD

DSON

DSTHGSoxnD

THGSDS

VVL

WCI

VR

VVVL

WCI

VVVIf

−⋅⋅⋅==

⋅−⋅⋅⋅=

−<<

µ

µ

1

:2

• For very small VDS (deep Triode Region):

ID can be approximated to be a linear function of VDS.

The device resistance will be independent of VDS and willonly depend on Veff.

The device will behave like a variable resistor

Page 13: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 13

25SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 6

• Increasing VDS causes the channel to acquire a tapered shape. Eventually,as VDS reaches VGS – VTH the channel is pinched off at the drain. IncreasingVDS above VGS – VTH has little effect (ideally, no effect) on the channel’sshape.

© Microelectronic Circuits, 2004 Oxford University Press

• When VDS is more than VGS – VTH the channel is pinched off, and thehorizontal electric field produces a current.

26SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 7

• If VDS > VGS – VTH, the transistor is in saturation (active) region,and the channel is pinched off.

∫ −−=∫−

==

THGS VV

VTHGSnox

L

xD dVVxVVWCdxI

0

'

0

])([µ

2)('2

1THGSoxnD VV

L

WCI −= µ

• Let’s, for now, assume that L’=L. The fact thatL’ is not equal to L is a second-order effectknown as channel-length modulation.

• Since ID only depends on VGS, MOS transistors in saturation can beused as current sources.

Page 14: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 14

27SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 8

• Current Equation for NMOS:

( )

( )[ ]

−>>−⋅⋅⋅⋅

−<>⋅−⋅−⋅⋅⋅

−<<>⋅−⋅⋅⋅

−<

==

)(,;)(2

1

)(,;2

1

)()(2,;

)(;0

2

2

SaturationVVVVVifVVL

WC

TriodeVVVVVifVVVVL

WC

TriodeDeepVVVVVifVVVL

WC

offCutVVif

II

THGSDSTHGSTHGSoxn

THGSDSTHGSDSDSTHGSoxn

THGSDSTHGSDSTHGSoxn

THGS

DSD

µ

µ

µ

28SMEECE 488 – Set 1: Introduction and Background

Long Channel Current Equations - 9

• Current Equation for PMOS:

( )

( )[ ]

−>>−⋅⋅⋅⋅

−<>⋅−⋅−⋅⋅⋅

−<<>⋅−⋅⋅⋅

−<

==

)(,;)(2

1

)(,;2

1

)()(2,;

)(;0

2

2

SaturationVVVVVifVVL

WC

TriodeVVVVVifVVVVL

WC

TriodeDeepVVVVVifVVVL

WC

offCutVVif

II

THSGSDTHSGTHSGoxp

THSGSDTHSGSDSDTHSGoxp

THSGSDTHSGSDTHSGoxp

THSG

SDD

µ

µ

µ

Page 15: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 15

29SMEECE 488 – Set 1: Introduction and Background

Regions of Operation - 1

• Regions of Operation:Cut-off, triode (linear), and saturation (active or pinch-off)

© Microelectronic Circuits, 2004 Oxford University Press

• Once the channel is pinched off, the current through the channel isalmost constant. As a result, the I-V curves have a very small slope inthe pinch-off (saturation) region, indicating the large channelresistance.

30SMEECE 488 – Set 1: Introduction and Background

Regions of Operation - 2

• The following illustrates the transition from pinch-off to triode region forNMOS and PMOS devices.

• For NMOS devices:If VD increases (VG Const.), the device will go from Triode to Pinch-off.If VG increases (VD Const.), the device will go from Pinch-off to Triode.

** In NMOS, as VDG increases the device will go from Triode to Pinch-off.• For PMOS devices:

If VD decreases (VG Const.), the device will go from Triode to Pinch-off.If VG decreases (VD Const.), the device will go from Pinch-off to Triode.

** In PMOS, as VGD increases the device will go from Pinch-off to Triode.

Page 16: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 16

31SMEECE 488 – Set 1: Introduction and Background

Regions of Operation - 3

© Microelectronic Circuits, 2004 Oxford University Press

• NMOS Regions of Operation:

• Relative levels of the terminal voltages of the enhancement-type NMOStransistor for different regions of operation.

32SMEECE 488 – Set 1: Introduction and Background

Regions of Operation - 4

© Microelectronic Circuits, 2004 Oxford University Press

• PMOS Regions of Operation:

• The relative levels of the terminal voltages of the enhancement-typePMOS transistor for different regions of operation.

Page 17: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 17

33SMEECE 488 – Set 1: Introduction and Background

Regions of Operation - 5

Example:For the following circuit assume that VTH=0.7V.• When is the device on?

• What is the region of operation if the device is on?

• Sketch the on-resistance of transistor M1 as a function of VG.

34SMEECE 488 – Set 1: Introduction and Background

Transconductance - 1

• The drain current of the MOSFET in saturation region is ideally afunction of gate-overdrive voltage (effective voltage). In reality, it is alsoa function of VDS.

• It makes sense to define a figure of merit that indicates how well thedevice converts the voltage to current.

• Which current are we talking about?

• What voltage is in the designer’s control?

• What is this figure of merit?

.ConstVV

Ig

DSGS

Dm =∂

∂=

Page 18: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 18

35SMEECE 488 – Set 1: Introduction and Background

Transconductance - 2

• Transconductance in triode:

• Transconductance in saturation:

( )[ ]DSoxn

DSDSDSTHGSoxn

GSm

VL

WC

ConstVVVVV

L

WC

Vg

⋅⋅⋅=

=

⋅−⋅−⋅⋅⋅∂

∂=

µ

µ.2

1 2

)(

.)(

2

1 2

THGSoxn

DSTHGSoxn

GSm

VVL

WC

ConstVVV

L

WC

Vg

−⋅⋅⋅=

=

−⋅⋅⋅⋅∂

∂=

µ

µ

Example:Plot the transconductance of the following circuit as a function of VDS

(assume Vb is a constant voltage).

• Moral: Transconductance drops if the device enters the triode region.

36SMEECE 488 – Set 1: Introduction and Background

Transconductance - 3

• Transconductance, gm, in saturation:

THGS

DDoxnTHGSoxnm VV

II

L

WCVV

L

WCg

−⋅

=⋅⋅⋅=−⋅⋅⋅=2

2)( µµ

• If the aspect ratio is constant: gm depends linearly on (VGS - VTH).Also, gm depends on square root of ID.

• If ID is constant: gm is inversely proportional to (VGS - VTH).Also, gm depends on square root of the aspect ratio.

• If the overdrive voltage is constant: gm depends linearly on ID.Also, gm depends linearly on the aspect ratio.

Page 19: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 19

37SMEECE 488 – Set 1: Introduction and Background

Second-Order Effects (Body Effect)

Substrate Voltage:• So far, we assumed that the bulk and source of the transistor are at the

same voltage (VB=VS).• If VB >Vs, then the bulk-source PN junction will be forward biased, and

the device will not operate properly.• If VB <Vs,

– the bulk-source PN junction will be reverse biased.– the depletion region widens, and Qdep increases.– VTH will be increased (Body effect or Backgate effect).

• It can be shown that (what is the unit for γ ?):

ox

subsiFSBFTHTH C

NqVVV

⋅⋅⋅=

Φ⋅−+Φ⋅⋅+=

εγγ

2220 where

38SMEECE 488 – Set 1: Introduction and Background

Body Effect - 2

No Body Effect With Body Effect

Example:Consider the circuit below (assume the transistor is in the active region):• If body-effect is ignored, VTH will be constant, and I1 will only depend on

VGS1=Vin-Vout. Since I1 is constant, Vin-Vout remains constant.

CVVVConstCVVV THoutinTHoutin +=−→==−− .

• As Vout increases, VSB1 increases, and as a result VTH increases.Therefore, Vin-Vout Increases.

• In general, I1 depends on VGS1- VTH =Vin-Vout-VTH (and with body effectVTH is not constant). Since I1 is constant, Vin-Vout-VTH remains constant:

.. ContsDCVVVConstCVVV THoutinTHoutin ==+=−→==−−

Page 20: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 20

39SMEECE 488 – Set 1: Introduction and Background

Body Effect - 3

Example:For the following Circuit sketch the drain current of transistor M1 when VX

varies from -∞ to 0. Assume VTH0=0.6V, γ=0.4V1/2, and 2ΦF=0.7V.

40SMEECE 488 – Set 1: Introduction and Background

Channel Length Modulation - 1

L

( )LL

LL

LLLLL∆+⋅≈

∆−⋅=

∆−= 1

1

1

111

'

1

• When a transistor is in the saturation region (VDS > VGS – VTH),the channel is pinched off.

• The drain current is LL-L'VVL

WCI THGSoxnD ∆=−= where2)(

'2

1 µ

• Assuming we get:DSVL

L ⋅=∆ λ ( ) ( )DSVLL

LLL

⋅+⋅=∆+⋅≈ λ11

11

'

1

• The drain current is ( ) ( )DSTHGSoxnTHGSoxnD VVVL

WCVV

L

WCI ⋅+⋅−≈−= λµµ 1

2

1 )(

'2

1 22

• As ID actually depends on both VGS and VDS, MOS transistors arenot ideal current sources (why?).

Page 21: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 21

41SMEECE 488 – Set 1: Introduction and Background

Channel Length Modulation - 2

• λ represents the relative variation in effective length of the channel for a givenincrement in VDS.

• For longer channels λ is smaller, i.e., λ ∝ 1/L

• Transconductance:

In Triode:

In Saturation (ignoring channel length modulation):

In saturation with channel length modulation:

• The dependence of ID on VDS is much weaker than its dependence on VGS.

.ConstVV

Ig

DSGS

Dm =∂

∂=

DSoxnm VL

WCg ⋅⋅⋅= µ

THGS

DDoxnTHGSoxnm VV

II

L

WCVV

L

WCg

−⋅

=⋅⋅⋅=−⋅⋅⋅=2

2)( µµ

( ) ( )THGS

DDSDoxnDSTHGSoxnm VV

IVI

L

WCVVV

L

WCg

−⋅

=⋅+⋅⋅⋅⋅=⋅+⋅−⋅⋅⋅=2

121)( λµλµ

42SMEECE 488 – Set 1: Introduction and Background

Channel Length Modulation - 3

Example:Given all other parameters constant, plot ID-VDS characteristic of an NMOSfor L=L1 and L=2L1

( ) ( )

( )

2

2

2

2

1

12

1

L

W

L

W

V

I

VVL

WC

V

I

VVVL

WCI

DS

D

THGSoxnDS

D

DSTHGSoxnD

∝⋅∝∂∂

⋅−=∂∂

⋅+⋅−≈

λ

λµ

λµ

:Therefore

: get weSo

• Changing the length of the device from L1 to 2L1 will flatten the ID-VDScurves (slope will be divided by two in triode and by four in saturation).

• Increasing L will make a transistor a better current source, whiledegrading its current capability.

• Increasing W will improve the current capability.

• In Triode Region:

• In Saturation Region:

( )[ ]L

W

V

I

VVVVL

WCI

DS

D

DSDSTHGSoxnD

∝∂∂

⋅−⋅−⋅⋅⋅≈

:Therefore

2

2

Page 22: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 22

43SMEECE 488 – Set 1: Introduction and Background

Sub-threshold Conduction

• If VGS < VTH, the drain current is not zero.• The MOS transistors behave similar to BJTs.

• In BJT:

• In MOS:

• As shown in the figure, in MOS transistors, the drain current drops byone decade for approximately each 80mV of drop in VGS.

• In BJT devices the current drops faster (one decade for approximatelyeach 60mv of drop in VGS).

• This current is known as sub-threshold or weak-inversion conduction.

T

BE

V

V

SC eII ⋅=

T

GS

V

V

D eII ⋅⋅= ζ0

44SMEECE 488 – Set 1: Introduction and Background

CMOS Processing Technology

• Top and side views of a typical CMOS process

Page 23: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 23

45SMEECE 488 – Set 1: Introduction and Background

CMOS Processing Technology

• Different layers comprising CMOS transistors

46SMEECE 488 – Set 1: Introduction and Background

Photolithography (Lithography)

• Used to transfer circuit layout information to the wafer

Page 24: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 24

47SM

Typical Fabrication Sequence

EECE 488 – Set 1: Introduction and Background

48SMEECE 488 – Set 1: Introduction and Background

Self-Aligned Process

• Why source and drain junctions are formed after the gate oxideand polysilicon layers are deposited?

Page 25: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 25

49SMEECE 488 – Set 1: Introduction and Background

Back-End Processing

• Oxide spacers and silicide

50SMEECE 488 – Set 1: Introduction and Background

Back-End Processing

• Contact and metal layers fabrication

Page 26: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 26

51SMEECE 488 – Set 1: Introduction and Background

Back-End Processing

• Large contact areas should be avoided to minimize thepossibility of spiking

52SMEECE 488 – Set 1: Introduction and Background

MOS Layout - 1

• It is beneficial to have some insight into the layout of the MOS devices.

• When laying out a design, there are many important parameters weneed to pay attention to such as: drain and source areas,interconnects, and their connections to the silicon through contactwindows.

• Design rules determine the criteria that a circuit layout must meet for agiven technology. Things like, minimum length of transistors, minimumarea of contact windows, …

Page 27: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 27

53SMEECE 488 – Set 1: Introduction and Background

MOS Layout - 2

Example:Figures below show a circuit with a suggested layout.

• The same circuit can be laid out in different ways, producing differentelectrical parameters (such as different terminal capacitances).

54SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 1

• The quadratic model determines the DC behavior of a MOS transistor.• The capacitances associated with the devices are important when

studying the AC behavior of a device.• There is a capacitance between any two terminals of a MOS transistor.

So there are 6 Capacitances in total.• The Capacitance between Drain and Source is negligible (CDS=0).

• These capacitances will depend on the region of operation (Biasvalues).

Page 28: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 28

55SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 2

• The following will be used to calculate the capacitances betweenterminals:1. Oxide Capacitance: ,

2. Depletion Capacitance:

3. Overlap Capacitance:

4. Junction Capacitance:

� Sidewall Capacitance:

� Bottom-plate Capacitance:

oxCLWC ⋅⋅=1ox

oxox t

=

F

subsidep

NqLWCC

Φ⋅⋅⋅

⋅⋅==42

ε

fringeoxDov CCLWCCC +⋅⋅=== 43

m

B

R

jjun

V

CC

Φ+

=

1

0jswC

jC

jswj CCCC +== 65

56SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 3

In Cut-off:1. CGS: is equal to the overlap capacitance.2. CGD: is equal to the overlap capacitance.3. CGB: is equal to Cgate-channel = C1 in series with Cchannel-bulk = C2.

4. CSB: is equal to the junction capacitance between source andbulk.

5. CDB: is equal to the junction capacitance between source andbulk.

3CCC ovGS ==

4CCC ovGD ==

5CCSB =

6CCDB =

Page 29: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 29

57SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 4

In Triode:• The channel isolates the gate from the substrate. This means that if VG

changes, the charge of the inversion layer are supplied by the drainand source as long as VDS is close to zero. So, C1 is divided betweengate and drain terminals, and gate and source terminals, and C2 isdivided between bulk and drain terminals, and bulk and sourceterminals.1. CGS:2. CGD:3. CGB: the channel isolates the gate from the substrate.4. CSB:5. CDB:

0=GBC

21C

CC ovGS +=

22

5

CCCSB +=

22

6

CCCDB +=

21C

CC ovGD +=

58SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 5

In Saturation:• The channel isolates the gate from the substrate. The voltage across

the channel varies which can be accounted for by adding twoequivalent capacitances to the source. One is between source andgate, and is equal to two thirds of C1. The other is between source andbulk, and is equal to two thirds of C2.1. CGS:2. CGD:3. CGB: the channel isolates the gate from the substrate.4. CSB:5. CDB:

0=GBC

13

2CCC ovGS +=

25 3

2CCCSB +=

6CCDB =

ovGD CC =

Page 30: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 30

59SMEECE 488 – Set 1: Introduction and Background

Device Capacitances - 6

• In summary:

CDB

CSB

CGB

CGD

CGS

SaturationTriodeCut-off

ovC

ovC ovC

13

2CCov +

25 3

2CC +

0

6C2

26

CC +

22

5

CC +

21C

Cov +

21C

Cov +

0121

21 CCCC

CCGB⟨⟨

+⋅

6C

5C

60SMEECE 488 – Set 1: Introduction and Background

Importance of Layout

Example (Folded Structure):Calculate the gate resistance of the circuits shown below.

Folded structure:• Decreases the drain capacitance• Decreases the gate resistance• Keeps the aspect ratio the same

Page 31: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 31

61SMEECE 488 – Set 1: Introduction and Background

Passive Devices

• Resistors

62SMEECE 488 – Set 1: Introduction and Background

Passive Devices

• Capacitors:

Page 32: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 32

63SMEECE 488 – Set 1: Introduction and Background

Passive Devices

• Capacitors

64SMEECE 488 – Set 1: Introduction and Background

Passive Devices

• Inductors

Page 33: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 33

65SMEECE 488 – Set 1: Introduction and Background

Latch-Up

• Due to parasitic bipolar transistors in a CMOS process

66SMEECE 488 – Set 1: Introduction and Background

Small Signal Models - 1

• Small signal model is an approximation of the large-signal modelaround the operation point.

• In analog circuits most MOS transistors are biased in saturation region.

• In general, ID is a function of VGS, VDS, and VBS. We can use this Taylorseries approximation:

BSmbo

DSGSmBS

BS

DDS

DS

DGS

GS

DD

BSBS

DDS

DS

DGS

GS

DDD

Vgr

VVgV

V

IV

V

IV

V

II

VV

IV

V

IV

V

III

∆⋅+∆

+∆⋅=∆⋅∂∂

+∆⋅∂∂

+∆⋅∂∂

≈∆

+∆⋅∂∂+∆⋅

∂∂+∆⋅

∂∂+= sorder term second :ExpansionTaylor 0

Page 34: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 34

67SMEECE 488 – Set 1: Introduction and Background

Small Signal Models - 2

• Current in Saturation:

• Taylor approximation:

• Partial Derivatives:

( ) ( )DSTHGSoxnTHGSoxnD VVVL

WCVV

L

WCI ⋅+⋅−≈−= λµµ 1

2

1 )(

'2

1 22

BSBS

DDS

DS

DGS

GS

DD V

V

IV

V

IV

V

II ∆⋅

∂∂

+∆⋅∂∂

+∆⋅∂∂

≈∆

( )

( )

mbm

SBF

m

SBF

DSTHGSoxnBS

TH

TH

D

BS

D

oDTHGSoxn

DS

D

mDSTHGSoxnGS

D

ggV

g

VVVV

L

WC

V

V

V

I

V

I

rIVV

L

WC

V

I

gVVVL

WC

V

I

=⋅=

+Φ⋅−⋅−=

+Φ⋅−⋅

⋅+⋅−⋅⋅⋅−=∂∂

⋅∂∂

=∂∂

=⋅≈⋅−⋅⋅⋅⋅=∂∂

=⋅+⋅−⋅⋅⋅=∂∂

ηγ

γλµ

λλµ

λµ

22

221)(

1)(

2

1

1)(

2

68SMEECE 488 – Set 1: Introduction and Background

Small Signal Models - 3

• Small-Signal Model:

BSmbo

DSGSmD vg

r

vvgi ⋅++⋅=

• Terms, gmvGS and gmbvBS, can be modeled by dependent sources.These terms have the same polarity: increasing vG, has the sameeffect as increasing vB.

• The term, vDS/ro can be modeled using a resistor as shown below.

Page 35: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 35

69SMEECE 488 – Set 1: Introduction and Background

Small Signal Models - 4

• Complete Small-Signal Model with Capacitances:

• Small signal model including all the capacitance makes the intuitive(qualitative) analysis of even a few-transistor circuit difficult!

• Typically, CAD tools are used for accurate circuit analysis

• For intuitive analysis we try to find a simplest model that can representthe role of each transistor with reasonable accuracy.

70SMEECE 488 – Set 1: Introduction and Background

Circuit Impedance - 1

• It is often useful to determine the impedance of a circuit seen from aspecific pair of terminals.

• The following is the recipe to do so:1. Connect a voltage source, VX, to the port.2. Suppress all independent sources.3. Measure or calculate IX.

X

X

X I

VR =

Page 36: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 36

71SMEECE 488 – Set 1: Introduction and Background

Circuit Impedance - 2

Example:• Find the small-signal impedance of the following current

sources.• We draw the small-signal model, which is the same for both

circuits, and connect a voltage source as shown below:

o

X

X

X

o

X

GSm

o

X

X

ri

vR

r

vvg

r

vi

==

=⋅+=

72SMEECE 488 – Set 1: Introduction and Background

Circuit Impedance - 3

Example:• Find the small-signal impedance of the following circuits.• We draw the small-signal model, which is the same for both

circuits, and connect a voltage source as shown below:

mbm

o

mbm

o

X

X

X

XmbXm

o

X

BSmbGSm

o

X

X

ggr

ggr

i

vR

vgvgr

vvgvg

r

vi

111

1 =++

==

⋅+⋅+=⋅−⋅−=

Page 37: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 37

73SMEECE 488 – Set 1: Introduction and Background

Circuit Impedance - 4

Example:• Find the small-signal impedance of the following circuit. This

circuit is known as the diode-connected load, and is usedfrequently in analog circuits.

• We draw the small-signal model and connect the voltagesource as shown below:

m

o

m

o

X

X

X

m

o

XXm

o

X

GSm

o

X

X

gr

gr

i

vR

gr

vvgr

vvg

r

vi

11

1

1

=+

==

+⋅=⋅+=⋅+=

• If channel length modulation is ignored (ro=∞) we get:

mmm

oX gggrR

111 =∞==

74SMEECE 488 – Set 1: Introduction and Background

Circuit Impedance - 5

Example:• Find the small-signal impedance of the following circuit. This

circuit is a diode-connected load with body effect.

mbm

o

mbm

o

mbm

o

X

X

X

mbm

o

X

XmbXm

o

X

BSmbGSm

o

X

X

ggr

ggr

ggr

i

vR

ggr

v

vgvgr

vvgvg

r

vi

1111

1

1

=+

=++

==

++⋅=

⋅+⋅+=⋅−⋅−=

• If channel length modulation is ignored (ro=∞) we get:

mbmmbmmbmmbm

oX ggggggggrR

11111 =+

=+

∞=+

=

Page 38: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 38

75SMEECE 488 – Set 1: Introduction and Background

Equivalent Transconductance - 1

• Recall that the transconductance of a transistor was a a figure ofmerit that indicates how well the device converts a voltage to current.

• It is sometimes useful to define the equivalent transconductance of acircuit as follows:

.ConstVV

Ig

DSGS

D

m =∂∂=

.ConstVV

IG

OUTIN

OUT

m =∂∂=

• The following is a small-signal block diagram of an arbitrary circuitwith a Norton equivalent at the output port. We notice that:VOUT=Constant so vOUT=0 in the small signal model.

0==

OUTIN

OUT

m vv

iG

76SMEECE 488 – Set 1: Introduction and Background

Equivalent Transconductance - 2

Example:• Find the equivalent transconductance of an NMOS transistor

in saturation from its small-signal model.

m

IN

OUT

m

INmGSmOUT

gv

iG

vgvgi

==

⋅=⋅=

Page 39: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 39

77SMEECE 488 – Set 1: Introduction and Background

Equivalent Transconductance - 3

Example:• Find the equivalent transconductance of the following circuit

when the NMOS transistor in saturation.

( )

( )SSmbSmOO

Om

O

S

SmbSm

m

IN

OUT

m

INm

O

S

SmbSmOUT

O

SOUT

SOUTmbSOUTINm

O

S

BSmbGSmOUT

SOUTGSSGSIN

RRgRgrr

rg

r

RRgRg

g

v

iG

vgr

RRgRgi

r

RiRigRivg

r

vvgvgi

Rivvvv

+⋅+⋅⋅+⋅=

+⋅+⋅+==

⋅=

+⋅+⋅+⋅

⋅−⋅−⋅+⋅−⋅=−⋅+⋅=

⋅+=+=

1

1

)(

78SMEECE 488 – Set 1: Introduction and Background

Short-Channel Effects

• Threshold Reduction

– Drain-induced barrier lowering (DIBL)

• Mobility degradation

• Velocity saturation

• Hot carrier effects

– Substrate current

– Gate current

• Output impedance variation

Page 40: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 40

79SMEECE 488 – Set 1: Introduction and Background

Threshold Voltage Variation in Short Channel Devices

• The Threshold of transistors fabricated on the same chip decreases asthe channel length decreases.

• Intuitively, the extent of depletion regions associated with drain andsource in the channel area, reduces the immobile charge that must beimaged by the charge on the gate.

80SMEECE 488 – Set 1: Introduction and Background

Drain-Induced Barrier Lowering (DIBL)

When the channel is short, the drainvoltage increases the channel surfacepotential, lowering the barrier to flowcharge from source (think of increasedelectric field) and therefore, decreasingthe threshold.

Page 41: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 41

81SMEECE 488 – Set 1: Introduction and Background

Effects of Velocity Saturation

• Due to drop in mobility at high electric fields

• (a) Premature drain current saturation and (b) reduction in gm

82SMEECE 488 – Set 1: Introduction and Background

Hot Carrier Effects

• Short channel devices may experience high lateral drain-sourceelectric field

• Some carriers that make it to drain have high velocity (called“hot” carriers)

• “Hot” carriers may “hit” silicon atoms at high speed and causeimpact ionization

• The resulting electron and holes are absorbed by the drain andsubstrate causing extra drain-substrate current

• Really “hot” carriers may be injected into gate oxide and flow outof gate causing gate current!

Page 42: EECE488: Analog CMOS Integrated Circuit Design Introduction and ...

SM 42

83SMEECE 488 – Set 1: Introduction and Background

Output Impedance Variation

Recall the definition of λ.

84SMEECE 488 – Set 1: Introduction and Background

Output Impedance Variation in Short-Channel Devices


Recommended