DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

ITRS 2004 Environmental, Safety and Health Chapter

ITRS Conference, San Francisco, CAJuly 14, 2004

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

• Proposed Updates for 2004

• Areas Under Discussion for 2005

AGENDA

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Elimination of Requirements that are already “ESH Best Practices”

1. Table 102 (Workplace Protection)• Exposure Data• Dependency upon Personal Protective

Equipment• Equipment/Process Risk Assessments• Ergonomic Stressor Evaluation• Collection of Regulatory Requirements• Pollutant Release and Transfer

Disclosure

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Restructured “Design for ESH” Section

1. Interim solutions are being used for Life Cycle Assessments (LCA) and for Chemical Risk Assessments.

2. Pollutant Release and Transfer Disclosure was dropped.

3. Regulatory requirements were dropped because they are covered by existing Environmental Management Systems.

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Resource Conservation for Energy and Water

1. Energy Conservation (Table 102)• Ratio of Fab Equipment to Facilities energy use

was changed from 50/50 to 40/60.

2. Water Conservation (Tables 102 and 105)• Eliminated redundancy by locating data only in

Table 102.

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Chemical/Materials Management

Table 103• Dropped requirements for safe dopant delivery

systems (goal achieved) and expanded definition of dopant requirements.

• Revised high-k materials of concern (dropped Ni, added Cr+6).

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Areas Under Discussion for 2005

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Chemical/Materials ManagementTable 102

• Revise “USE” metric to a “UTILIZATION” value .• Intend to replace generic recycling requirements

with specific recycling technology – need industry comment on where this is appropriate.

Table 103• Validate the percent of current copper

reclaim/recycle. • Replace generic improvement requirements with

utilization factors.

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Emerging Research Materials

1. Need to identify existing ESH restrictions pertaining to ERMs research.

2. Need to understand impact of uncertain future ESH barriers on ERMs.

3. New and emerging materials may have unique metrology requirements.

e.g. – Nanomaterials

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Synergy Between Technology R&D and ESH Legislative and Regulatory Development

1. Lack of synergy between technology R&D and ESH legislative/regulatory development. – Improve “crystal ball”

2. Regional differences in chemical regulatory restrictions (government and/or supplier constrained).

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Data Collection

1. More installed base data are required to identify performance trends.

2. Need better definition for “Manufacturable solutions exist” with regard to ESH requirements.

3. Collect more data to establish baseline environmental burden.

DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference

Resource Conservation Targets

• A difference exists between resource targets (water, energy, etc.) for ITRS and existing technology.

Compare 300mm wafer actuals versus the original 200mm to 300mm conversion goals